JPS63100735U - - Google Patents
Info
- Publication number
- JPS63100735U JPS63100735U JP1986194751U JP19475186U JPS63100735U JP S63100735 U JPS63100735 U JP S63100735U JP 1986194751 U JP1986194751 U JP 1986194751U JP 19475186 U JP19475186 U JP 19475186U JP S63100735 U JPS63100735 U JP S63100735U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- frame
- mask
- pellicle frame
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986194751U JPS63100735U (bg) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986194751U JPS63100735U (bg) | 1986-12-18 | 1986-12-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63100735U true JPS63100735U (bg) | 1988-06-30 |
Family
ID=31152013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986194751U Pending JPS63100735U (bg) | 1986-12-18 | 1986-12-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63100735U (bg) |
-
1986
- 1986-12-18 JP JP1986194751U patent/JPS63100735U/ja active Pending