JPS6310059U - - Google Patents

Info

Publication number

JPS6310059U

JPS6310059U JP1986103929U JP10392986U JPS6310059U JP S6310059 U JPS6310059 U JP S6310059U JP 1986103929 U JP1986103929 U JP 1986103929U JP 10392986 U JP10392986 U JP 10392986U JP S6310059 U JPS6310059 U JP S6310059U

Authority

JP

Japan

Prior art keywords

semiconductor wafers

polishing jig

replacement

template

bottom plate

Prior art date

1986-07-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005498 polishing Methods 0.000 claims 6
• 239000004065 semiconductor Substances 0.000 claims 6
• 235000012431 wafers Nutrition 0.000 claims 6
• 230000003014 reinforcing effect Effects 0.000 claims 2
• 229920003002 synthetic resin Polymers 0.000 claims 2
• 239000000057 synthetic resin Substances 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 230000002787 reinforcement Effects 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (3)