JPS6310050U - - Google Patents
Info
- Publication number
- JPS6310050U JPS6310050U JP10212286U JP10212286U JPS6310050U JP S6310050 U JPS6310050 U JP S6310050U JP 10212286 U JP10212286 U JP 10212286U JP 10212286 U JP10212286 U JP 10212286U JP S6310050 U JPS6310050 U JP S6310050U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- reciprocates
- drive device
- polishing
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10212286U JPS6310050U (cs) | 1986-07-04 | 1986-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10212286U JPS6310050U (cs) | 1986-07-04 | 1986-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310050U true JPS6310050U (cs) | 1988-01-22 |
Family
ID=30973480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10212286U Pending JPS6310050U (cs) | 1986-07-04 | 1986-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310050U (cs) |
-
1986
- 1986-07-04 JP JP10212286U patent/JPS6310050U/ja active Pending