JPS63100420A - Light dividing optical device - Google Patents

Light dividing optical device

Info

Publication number
JPS63100420A
JPS63100420A JP24533286A JP24533286A JPS63100420A JP S63100420 A JPS63100420 A JP S63100420A JP 24533286 A JP24533286 A JP 24533286A JP 24533286 A JP24533286 A JP 24533286A JP S63100420 A JPS63100420 A JP S63100420A
Authority
JP
Japan
Prior art keywords
light
reflector
signal
intensity
differential amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24533286A
Other languages
Japanese (ja)
Inventor
Hideo Sugawara
菅原 秀郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON LASER KK
Original Assignee
NIPPON LASER KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON LASER KK filed Critical NIPPON LASER KK
Priority to JP24533286A priority Critical patent/JPS63100420A/en
Publication of JPS63100420A publication Critical patent/JPS63100420A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To continuously change a light intensity ratio with a simple constitution by detecting intensities of light divided by two kinds of reflecting face and controlling movement of the first reflector on the basis of comparison between the intensity ratio of detection signals and a set intensity ratio. CONSTITUTION:Two kinds of detection signal are supplied to the first and second differential amplifiers 13 and 16 and are compared with voltages from a reference power source 14 which is divided by a dividing resistance 15. The first differential amplifier 13 compares the signal corresponding to the intensity of light reflected on a reflecting face A of a prism 2 with the voltage divided by the dividing resistance 15 and supplies the difference signal to the third differential amplifier 17. The second differential amplifier 16 compares the signal corresponding to the intensity of light reflected on a reflecting face B of the prism 2 with the other voltage divided by the dividing resistance 15 and supplies the difference signal to the other terminal of the third difference amplifier 17. A control circuit 18 to which the difference signal of two kinds of signal generated there are supplied controls a driving mechanism 19 so that the output signal of the third differential amplifier 17 is zero.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はレーザ光等の光を分割する光学装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to an optical device that splits light such as a laser beam.

[従来の技術] 通常、レーザ光等を2光束に分割するためには、ビーム
スプリッタと呼ばれる半透明鏡が使用されている。この
ビームスプリッタは、透明なガラス基板上に屈折率の異
なる物質を多層にコーティングして使用している。
[Prior Art] Normally, a semi-transparent mirror called a beam splitter is used to split a laser beam or the like into two beams. This beam splitter uses a transparent glass substrate coated with multiple layers of materials having different refractive indexes.

[発明が解決しようとする問題点] このビームスプリッタの透過光と反射光との比率は、コ
ーティングの段階で決定されてしまい、例えば、1:1
の分割比率となるように多11幕をコーティングしたビ
ームスプリッタは、この比率で固定されており、2種の
光の強度比を、例えば、1:3.1:5のように変化さ
せたい場合には、その都度、光学系に配置されているビ
ームスプリッタを所望の分割比のビームスプリッタに交
換しなければならず、面倒である。又、細かく光の強度
の比を変える必要のある光学系では、それだけ多くのビ
ームスプリッタを用意しなければならず、コストアップ
になる。更に、いくら多数のビームスプリッタを用意し
たとしても、連続的に光の強度比を変えることは不可能
である。
[Problems to be Solved by the Invention] The ratio of transmitted light and reflected light of this beam splitter is determined at the coating stage, and is, for example, 1:1.
A beam splitter coated with 11 curtains has a splitting ratio of In this case, the beam splitter disposed in the optical system must be replaced each time with a beam splitter having the desired splitting ratio, which is troublesome. Furthermore, in an optical system that requires finely changing the ratio of light intensities, it is necessary to prepare a correspondingly large number of beam splitters, which increases costs. Furthermore, no matter how many beam splitters are prepared, it is impossible to continuously change the light intensity ratio.

本発明は、上述した点に鑑みてなされたもので、簡単な
構成により連続的に光の強度比を変えることができる光
学系を提供することを目的としている。
The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide an optical system that can continuously change the intensity ratio of light with a simple configuration.

[問題点を解決するための手段] 本発明に基づく光分割光学装置は、被分割光の光路上に
配置された2種の反射面を有する反射体と、該2種の反
射面に入射する光の反射面積の比率を変え得るように該
反射体を移動するための移動手段と、該2種の反射面に
よって分割された光の強度を検出する手段と、該211
の検出信号の強度比と設定強度比とを比較し、該比較に
基づいて該第1の反射体の移動を11111する11t
s手段とを有していることを特徴としている。
[Means for Solving the Problems] A light splitting optical device based on the present invention includes a reflector having two types of reflective surfaces disposed on the optical path of light to be split, and a light beam that is incident on the two types of reflective surfaces. a moving means for moving the reflector so as to change the ratio of reflection areas of the light; a means for detecting the intensity of the light divided by the two types of reflecting surfaces;
11t, which compares the intensity ratio of the detection signal with the set intensity ratio, and moves the first reflector 11111 based on the comparison;
s means.

[実施例] 以下本発明の一実施例を添附図面に基づいて詳述する。[Example] An embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

図中1は、図示していないレーザ発振器から発生したレ
ーザ光りが入射するコリメータレンズであり、該コリメ
ータレンズ1の出射光は、反射面A、Bを有した第1の
反射体である光分割プリズム2に入射する。該反射面A
によって反射された光は第2の反射体3によって反射さ
れ、該反射面已によって反射された光は第3の反射体4
によって反射される。5は該第2の反射体3によって反
射された光を第1の光ファイバー6の入射端に導くため
の光学レンズ、7は該第3の反射体4によって反射され
た光を第2の光ファイバー8の入射端に導くための光学
レンズである。9は該第2の反射体によって反射された
光の光路上に配置された半透明鏡、10は該半透明tA
9によって反射された光を検出する光検出器であり、1
1は該第3の反射体によって反射された光の光路上に配
置された半透明鏡、12は該半透明l!11によって反
射された光を検出する光検出器である。該光検出器10
の出力信号は、第1の差動増幅器13の一方の端子に供
給されるが、該第1の差動増幅器13の他端には、基準
電源14の出力電圧が分割抵抗15によって分割されて
供給されている。該分割抵抗15によって分割された他
方の電圧は、第2の差動増幅器16の一端に供給されて
いるが、該第2の差動増幅器16の他端には、該光検出
器12の出力信号が供給されている。該第1と第2の差
動増幅器13.16の出力信号は、夫々第3の差動増幅
器17に供給されている。該第3の差動増幅器17の出
力信号は、制御回路18に供給されている。該制御回路
18は、光分割プリズム2の移動機構19.第2の反射
体3の移動機構20、第3の反射体4の移動機構21を
制御している。なお、22.23は夫々光ファイバー6
.8への光の入射を随時阻止するために配置された光シ
ヤツターである。
Reference numeral 1 in the figure is a collimator lens into which laser light generated from a laser oscillator (not shown) enters, and the emitted light from the collimator lens 1 is split into a first reflector having reflective surfaces A and B. The light enters prism 2. The reflective surface A
The light reflected by the second reflector 3 is reflected by the second reflector 3, and the light reflected by the reflective surface is reflected by the third reflector 4.
reflected by. 5 is an optical lens for guiding the light reflected by the second reflector 3 to the input end of the first optical fiber 6, and 7 is for guiding the light reflected by the third reflector 4 to the second optical fiber 8. This is an optical lens for guiding the light to the incident end of the 9 is a semi-transparent mirror placed on the optical path of the light reflected by the second reflector; 10 is the semi-transparent tA;
9 is a photodetector that detects the light reflected by 1.
1 is a semi-transparent mirror placed on the optical path of the light reflected by the third reflector; 12 is the semi-transparent l! 11 is a photodetector that detects the light reflected by the photodetector. The photodetector 10
The output signal of the reference power supply 14 is supplied to one terminal of the first differential amplifier 13, and the output voltage of the reference power supply 14 is divided by the dividing resistor 15 and the output signal of the reference power supply 14 is supplied to the other terminal of the first differential amplifier 13. Supplied. The other voltage divided by the dividing resistor 15 is supplied to one end of the second differential amplifier 16, and the output of the photodetector 12 is supplied to the other end of the second differential amplifier 16. signal is being supplied. The output signals of the first and second differential amplifiers 13, 16 are supplied to a third differential amplifier 17, respectively. The output signal of the third differential amplifier 17 is supplied to a control circuit 18. The control circuit 18 controls a movement mechanism 19 for the light splitting prism 2. A moving mechanism 20 for the second reflector 3 and a moving mechanism 21 for the third reflector 4 are controlled. In addition, 22 and 23 are optical fibers 6, respectively.
.. This is a light shutter arranged to block light from entering the shutter 8 at any time.

上述した如き構成において、被分割レーザ光りは、光分
割プリズム2に入射し1反射面aと反射面Bによって反
射した2種の光に分割され、一方の光は第2の反射体3
によって反射されて第1の光ファイバー6に導かれ、他
方の光は第3の反射体4によって反射されて第2の光フ
ァイバ8に導かれて所定の用途に用いられる。ここで、
第1の反射体である光分割プリズム2を図中矢印で示し
たX方向に移動させれば、反射面Aと反射面Bに入射す
る光の面積が変化し、その結果、第1と第2の光ファイ
バー6.8に入射する光の強度比は、該プリズム2のX
方向の位置に応じて連続的に変化することになる。
In the configuration as described above, the laser beam to be split enters the light splitting prism 2 and is split into two types of light reflected by the first reflecting surface a and the reflecting surface B, and one of the lights is reflected by the second reflecting surface 3.
The other light is reflected by the third reflector 4 and guided to the second optical fiber 8, and is used for a predetermined purpose. here,
If the light splitting prism 2, which is the first reflector, is moved in the X direction indicated by the arrow in the figure, the area of the light incident on the reflective surfaces A and B changes, and as a result, the area of the light incident on the first and second reflective surfaces A and B changes. The intensity ratio of the light incident on the optical fiber 6.8 of the prism 2 is
It will change continuously depending on the position in the direction.

さて、該プリズム2の位置が移動機構19によって移動
させられ、図中点線で示した2′の位置に配置されると
、被分割レーザ光りの100%が該プリズム2の反射面
Aによって反射され、反射面Bに入射する光は皆無とな
る。この時、プリズムの位置が2の時と2′の時とでは
、反射面Aによつて反射する光の中心軸がずれることに
なる。
Now, when the position of the prism 2 is moved by the moving mechanism 19 and placed at the position 2' indicated by the dotted line in the figure, 100% of the laser beam to be split will be reflected by the reflective surface A of the prism 2. , no light enters the reflective surface B. At this time, the central axis of the light reflected by the reflecting surface A is shifted between when the prism is at the position 2 and when the prism is at the position 2'.

そのため、この実施例では、第2の反射[113の位置
を該プリズム2の位置の変化に応じてX方向に移動させ
、該第2の反射体3によって反射される光の光軸が該反
射面Aの反射面積の変化によっても変わらないように制
御している。より具体的には、$1111回路18から
所定の分割比に応じたプリズム2の移動制御信号がプリ
ズム移動機構19に供給されると、該制御回路18は、
該プリズムの移動IIJ御信号に応じた制御信号を第2
の反射体3の移動機構20に供給し、該反射体3をX方
向に移動させる。もちろん、この時、v制御回路18は
第3の反射体4の移動機構21にも制御信号を供給し、
該第3の反射体4によって反射される光の中心軸を一定
に維持するようにしている。なお、この実施例では、第
2と第3の反射体3,4を夫々別の移動機構を用いて移
動させるようにしたが、該第2と第3の反射体を一体的
に取付け、単一の移動機構で両者を移動させるように構
成しても良い。
Therefore, in this embodiment, the position of the second reflection [113] is moved in the X direction according to the change in the position of the prism 2, so that the optical axis of the light reflected by the second reflector 3 is It is controlled so that it does not change even when the reflection area of surface A changes. More specifically, when a movement control signal for the prism 2 according to a predetermined division ratio is supplied from the $1111 circuit 18 to the prism movement mechanism 19, the control circuit 18
A second control signal corresponding to the prism movement IIJ control signal is
is supplied to the moving mechanism 20 for the reflector 3 to move the reflector 3 in the X direction. Of course, at this time, the v control circuit 18 also supplies a control signal to the moving mechanism 21 of the third reflector 4,
The central axis of the light reflected by the third reflector 4 is kept constant. In this embodiment, the second and third reflectors 3 and 4 are moved using separate moving mechanisms, but the second and third reflectors are integrally attached and can be moved by a single unit. A configuration may be adopted in which both are moved by one moving mechanism.

上述したように、第2と第3の反射体3.4によって反
射された光は、所望の分割比となるが、該反射体夫々に
よって反射された光の光路には、半透明鏡9.11が配
置されており、該分割光の一部は該牛透鏡によって反射
されて光検出器10゜12に検出される。該光検出器1
0.12の出力信号強度は、夫々、分割された2種の光
の強度に比例している。該2種の検出信号は、第1と第
2の差動増幅器13.16に供給されて、夫々分割抵抗
15によって分割された基準電WA14かもの電圧と比
較される。該第1の差動増幅器13においては、プリズ
ム2の反射1ffiAによって反射された光の強度に応
じた信号と、分割抵抗15によって分割された電圧とを
比較し、その差信号を第3の差動増幅器17に供給する
。一方、第2の差動増幅5116においては、プリズム
2の反射面Bによって反射された光の強度に応じた信号
と、分割抵抗15によって分割された他方の電圧とを比
較し、その差信号を第3の差動増幅器17の他端に供給
する。該第3の差動増幅B17は、供給された2種の信
号の差信号を発生し、$11111回路18に供給する
。該11m回路18は、該第3の差動増幅!117の出
力信号が零になるように駆動機構19をMIDする。そ
の結果、該プリズム2は、該第3の差動増幅器17の出
力信号が零となるようにX方向に移動させられ、従って
、反射面Aと8とによって反射される2種の光の強度比
は、該分割抵抗15における電圧の分割比に等しくされ
る。
As described above, the light reflected by the second and third reflectors 3.4 has a desired splitting ratio, but the optical path of the light reflected by each of the reflectors includes a semi-transparent mirror 9.4. 11 is arranged, and a part of the split light is reflected by the cow mirror and detected by the photodetector 10.degree. 12. The photodetector 1
The output signal strength of 0.12 is proportional to the intensity of the two divided lights. The two types of detection signals are supplied to the first and second differential amplifiers 13 and 16, and are compared with the voltage of the reference voltage WA14 divided by the dividing resistor 15, respectively. The first differential amplifier 13 compares the signal corresponding to the intensity of the light reflected by the reflection 1ffiA of the prism 2 and the voltage divided by the dividing resistor 15, and converts the difference signal into a third difference signal. The signal is supplied to a dynamic amplifier 17. On the other hand, the second differential amplification 5116 compares the signal corresponding to the intensity of the light reflected by the reflective surface B of the prism 2 with the other voltage divided by the dividing resistor 15, and calculates the difference signal. It is supplied to the other end of the third differential amplifier 17. The third differential amplifier B17 generates a difference signal between the two types of signals supplied, and supplies it to the $11111 circuit 18. The 11m circuit 18 is the third differential amplification! The drive mechanism 19 is MIDed so that the output signal of the drive mechanism 117 becomes zero. As a result, the prism 2 is moved in the X direction so that the output signal of the third differential amplifier 17 becomes zero, thus reducing the intensity of the two types of light reflected by the reflecting surfaces A and 8. The ratio is made equal to the voltage division ratio at the dividing resistor 15.

以上本発明を詳述したが、本発明は、上述した実施例に
限定されず幾多の変形が可能である=例えば、第1の反
射体としてプリズムを用いたが、必ずしもプリズムであ
る必要はなく、例えば、2枚の反射鏡を所定の角度で一
体的にした反射体を用いても良い。又、分割レーザ光を
光ファイバーに導(光学系以外の光学系にも本発明を適
用することができる。
Although the present invention has been described in detail above, the present invention is not limited to the embodiments described above and can be modified in many ways. For example, although a prism is used as the first reflector, it does not necessarily have to be a prism. For example, a reflector formed by integrating two reflecting mirrors at a predetermined angle may be used. Furthermore, the present invention can be applied to optical systems other than optical systems in which the divided laser beams are guided to optical fibers.

[効果] 以上詳述した如く、本発明は、2種の反射面を有した反
射体を移動させる簡単な光学系により、光を分割できる
と共に、該分割された211の光の強度比を連続的に所
望の値とすることができ、更には、分割された光の軸を
一定に維持することができる。
[Effects] As described in detail above, the present invention can divide light by using a simple optical system that moves a reflector having two types of reflective surfaces, and can continuously adjust the intensity ratio of the divided 211 lights. In addition, the axis of the divided light can be maintained constant.

【図面の簡単な説明】 添附図面は、本発明の一実施例である光分割光学装置を
示している。 1・・・コリメータレンズ 2・・・光分割プリズム 3・・・第2の反射体4・・
・第3の反射体  5.7・・・レンズ6.8・・・光
ファイバー 9.11・・・半透明!+!10.12・・・検出器1
3.16.17・・・差動増幅器 14・・・基準電源    15・・・分割抵抗18・
・・llll11回路 19.20.21・・・移動機構 22.23・・・シャッター
BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings show a light splitting optical device that is an embodiment of the present invention. 1... Collimator lens 2... Light splitting prism 3... Second reflector 4...
・Third reflector 5.7...Lens 6.8...Optical fiber 9.11...Semi-transparent! +! 10.12...Detector 1
3.16.17... Differential amplifier 14... Reference power supply 15... Dividing resistor 18...
...llll11 circuit 19.20.21...Movement mechanism 22.23...Shutter

Claims (1)

【特許請求の範囲】[Claims] (1)被分割光の光路上に配置された2種の反射面を有
する反射体と、該2種の反射面に入射する光の反射面積
の比率を変え得るように該反射体を移動するための移動
手段と、該2種の反射面によって分割された光の強度を
検出する手段と、該2種の検出信号の強度比と設定強度
比とを比較し、該比較に基づいて該第1の反射体の移動
を制御する制御手段とを有した光分割光学装置
(1) A reflector having two types of reflective surfaces placed on the optical path of the light to be split, and moving the reflector so as to change the ratio of the reflection area of light incident on the two types of reflective surfaces. a means for detecting the intensity of the light divided by the two types of reflective surfaces, a means for detecting the intensity of the light divided by the two types of reflecting surfaces, and a means for detecting the intensity of the light divided by the two types of reflective surfaces, and comparing the intensity ratio of the two types of detection signals with a set intensity ratio, and based on the comparison, the A light splitting optical device having a control means for controlling the movement of the reflector of No. 1.
JP24533286A 1986-10-17 1986-10-17 Light dividing optical device Pending JPS63100420A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24533286A JPS63100420A (en) 1986-10-17 1986-10-17 Light dividing optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24533286A JPS63100420A (en) 1986-10-17 1986-10-17 Light dividing optical device

Publications (1)

Publication Number Publication Date
JPS63100420A true JPS63100420A (en) 1988-05-02

Family

ID=17132088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24533286A Pending JPS63100420A (en) 1986-10-17 1986-10-17 Light dividing optical device

Country Status (1)

Country Link
JP (1) JPS63100420A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55142307A (en) * 1979-04-24 1980-11-06 Matsushita Electric Ind Co Ltd Optical axis position correcting device
JPS6022113A (en) * 1983-07-19 1985-02-04 Olympus Optical Co Ltd Light source device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55142307A (en) * 1979-04-24 1980-11-06 Matsushita Electric Ind Co Ltd Optical axis position correcting device
JPS6022113A (en) * 1983-07-19 1985-02-04 Olympus Optical Co Ltd Light source device

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