JPS6297960U - - Google Patents

Info

Publication number
JPS6297960U
JPS6297960U JP19120885U JP19120885U JPS6297960U JP S6297960 U JPS6297960 U JP S6297960U JP 19120885 U JP19120885 U JP 19120885U JP 19120885 U JP19120885 U JP 19120885U JP S6297960 U JPS6297960 U JP S6297960U
Authority
JP
Japan
Prior art keywords
mirror
beam splitter
interference
photoelectric conversion
optical flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19120885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454457Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985191208U priority Critical patent/JPH0454457Y2/ja
Publication of JPS6297960U publication Critical patent/JPS6297960U/ja
Application granted granted Critical
Publication of JPH0454457Y2 publication Critical patent/JPH0454457Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP1985191208U 1985-12-12 1985-12-12 Expired JPH0454457Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985191208U JPH0454457Y2 (cs) 1985-12-12 1985-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985191208U JPH0454457Y2 (cs) 1985-12-12 1985-12-12

Publications (2)

Publication Number Publication Date
JPS6297960U true JPS6297960U (cs) 1987-06-22
JPH0454457Y2 JPH0454457Y2 (cs) 1992-12-21

Family

ID=31145135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985191208U Expired JPH0454457Y2 (cs) 1985-12-12 1985-12-12

Country Status (1)

Country Link
JP (1) JPH0454457Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6729908B2 (ja) * 2015-02-23 2020-07-29 ザ・ボード・オブ・トラスティーズ・オブ・ザ・リーランド・スタンフォード・ジュニア・ユニバーシティ 位相面変調センサと、製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160279U (cs) * 1974-11-05 1976-05-12
JPS5646469A (en) * 1979-09-07 1981-04-27 Siemens Ag Method of measuring speed of rotation employing ring interference gage

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160279U (cs) * 1974-11-05 1976-05-12
JPS5646469A (en) * 1979-09-07 1981-04-27 Siemens Ag Method of measuring speed of rotation employing ring interference gage

Also Published As

Publication number Publication date
JPH0454457Y2 (cs) 1992-12-21

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