JPS6297303U - - Google Patents
Info
- Publication number
- JPS6297303U JPS6297303U JP19061985U JP19061985U JPS6297303U JP S6297303 U JPS6297303 U JP S6297303U JP 19061985 U JP19061985 U JP 19061985U JP 19061985 U JP19061985 U JP 19061985U JP S6297303 U JPS6297303 U JP S6297303U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- piston
- passage
- communicating
- control mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Servomotors (AREA)
- Fluid-Pressure Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985190619U JPH0520884Y2 (ru) | 1985-12-10 | 1985-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985190619U JPH0520884Y2 (ru) | 1985-12-10 | 1985-12-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297303U true JPS6297303U (ru) | 1987-06-20 |
| JPH0520884Y2 JPH0520884Y2 (ru) | 1993-05-28 |
Family
ID=31144008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985190619U Expired - Lifetime JPH0520884Y2 (ru) | 1985-12-10 | 1985-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0520884Y2 (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017001229A (ja) * | 2015-06-08 | 2017-01-05 | ニッコー・マテリアルズ株式会社 | 真空積層方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51119491U (ru) * | 1975-03-25 | 1976-09-28 |
-
1985
- 1985-12-10 JP JP1985190619U patent/JPH0520884Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51119491U (ru) * | 1975-03-25 | 1976-09-28 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017001229A (ja) * | 2015-06-08 | 2017-01-05 | ニッコー・マテリアルズ株式会社 | 真空積層方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0520884Y2 (ru) | 1993-05-28 |