JPS6296841U - - Google Patents

Info

Publication number
JPS6296841U
JPS6296841U JP18838585U JP18838585U JPS6296841U JP S6296841 U JPS6296841 U JP S6296841U JP 18838585 U JP18838585 U JP 18838585U JP 18838585 U JP18838585 U JP 18838585U JP S6296841 U JPS6296841 U JP S6296841U
Authority
JP
Japan
Prior art keywords
holder
drawn
electron beam
holder body
beam lithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18838585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18838585U priority Critical patent/JPS6296841U/ja
Publication of JPS6296841U publication Critical patent/JPS6296841U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP18838585U 1985-12-09 1985-12-09 Pending JPS6296841U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18838585U JPS6296841U (enrdf_load_stackoverflow) 1985-12-09 1985-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18838585U JPS6296841U (enrdf_load_stackoverflow) 1985-12-09 1985-12-09

Publications (1)

Publication Number Publication Date
JPS6296841U true JPS6296841U (enrdf_load_stackoverflow) 1987-06-20

Family

ID=31139696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18838585U Pending JPS6296841U (enrdf_load_stackoverflow) 1985-12-09 1985-12-09

Country Status (1)

Country Link
JP (1) JPS6296841U (enrdf_load_stackoverflow)

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