JPS6296840U - - Google Patents
Info
- Publication number
- JPS6296840U JPS6296840U JP18719785U JP18719785U JPS6296840U JP S6296840 U JPS6296840 U JP S6296840U JP 18719785 U JP18719785 U JP 18719785U JP 18719785 U JP18719785 U JP 18719785U JP S6296840 U JPS6296840 U JP S6296840U
- Authority
- JP
- Japan
- Prior art keywords
- exposed
- electron beam
- preliminary chamber
- beam exposure
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18719785U JPS6296840U (enExample) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18719785U JPS6296840U (enExample) | 1985-12-06 | 1985-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296840U true JPS6296840U (enExample) | 1987-06-20 |
Family
ID=31137452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18719785U Pending JPS6296840U (enExample) | 1985-12-06 | 1985-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296840U (enExample) |
-
1985
- 1985-12-06 JP JP18719785U patent/JPS6296840U/ja active Pending