JPS6296254U - - Google Patents
Info
- Publication number
- JPS6296254U JPS6296254U JP18719485U JP18719485U JPS6296254U JP S6296254 U JPS6296254 U JP S6296254U JP 18719485 U JP18719485 U JP 18719485U JP 18719485 U JP18719485 U JP 18719485U JP S6296254 U JPS6296254 U JP S6296254U
- Authority
- JP
- Japan
- Prior art keywords
- sheath heater
- gas introduction
- introduction pipe
- vaporization device
- solid sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims description 3
- 238000009834 vaporization Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18719485U JPS6296254U (pt) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18719485U JPS6296254U (pt) | 1985-12-06 | 1985-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296254U true JPS6296254U (pt) | 1987-06-19 |
Family
ID=31137446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18719485U Pending JPS6296254U (pt) | 1985-12-06 | 1985-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296254U (pt) |
-
1985
- 1985-12-06 JP JP18719485U patent/JPS6296254U/ja active Pending