JPS6295904A - Unmanned carrier system - Google Patents
Unmanned carrier systemInfo
- Publication number
- JPS6295904A JPS6295904A JP60235897A JP23589785A JPS6295904A JP S6295904 A JPS6295904 A JP S6295904A JP 60235897 A JP60235897 A JP 60235897A JP 23589785 A JP23589785 A JP 23589785A JP S6295904 A JPS6295904 A JP S6295904A
- Authority
- JP
- Japan
- Prior art keywords
- guided vehicle
- automatic guided
- battery
- power
- power receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 11
- 238000000034 method Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/60—Other road transportation technologies with climate change mitigation effect
- Y02T10/70—Energy storage systems for electromobility, e.g. batteries
Landscapes
- Electric Propulsion And Braking For Vehicles (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
Abstract
Description
【発明の詳細な説明】
主呈上勿程尻立夏
本発明は、駆動源としてのバッテリーを搭載した形式の
無人搬送車を複数のステーション間で運行し、各ステー
ションで処理装置にワークのロード、アンロードを行う
無人搬送車システムに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention operates an automatic guided vehicle equipped with a battery as a driving source between a plurality of stations, loads a work into a processing device at each station, and This invention relates to an automated guided vehicle system that performs unloading.
従来の技術
半導体素子の製造に必要なウェハの洗浄・酸化・拡散・
エツチングその他の諸工程はクリーンルーム内の処理装
置で行われ、それぞれの処理装置へのウェハのロード、
アンロードは、処理装置のロード、アンロード位置に設
けた各ステーション間で無人搬送車を運行することによ
っている。即ち、第４図に例示したように、クリーンル
ームの床面に付設されたアルミニウムテープ又は無線誘
導線（以下、アルミニウムテープという。）Ｒをセンシ
ングしながら複数の無人搬送車１・・・が走行して各ス
テーションＡ、Ｂ、Ｃ，Ｄ、Ｅ、Ｆ間で移動し、ウェハ
を処理装置Ｘｉ、Ｘ２・・・にロード、アンロードする
ようになっている。Conventional technologyWafer cleaning, oxidation, diffusion, and
Etching and other processes are performed in processing equipment in a clean room, and wafers are loaded into each processing equipment,
Unloading is carried out by operating automatic guided vehicles between stations provided at the loading and unloading positions of the processing equipment. That is, as illustrated in FIG. 4, a plurality of automatic guided vehicles 1 run while sensing an aluminum tape or radio guide wire (hereinafter referred to as aluminum tape) R attached to the floor of a clean room. The wafers are moved between stations A, B, C, D, E, and F to load and unload wafers to and from processing apparatuses Xi, X2, . . . .
ところで、無人搬送車は、その駆動源として適時に充電
を必要とするバッテリーを搭載しているので、従来は、
同図に示したように、上記の諸工程を行うステーション
Ａ−Ｆとは別にバッテリーチェンジャーというステーシ
ョンＧを設け、一定時間運行した無人搬送車１をこのス
テーションＧまで移動させてバッテリーを充電済みのも
のに交換し、再び運行系統に投入していた。By the way, since automatic guided vehicles are equipped with batteries that require timely charging as their driving source, conventionally,
As shown in the figure, a station G called a battery changer is set up separately from stations A to F that perform the above-mentioned processes, and the automatic guided vehicle 1 that has been operating for a certain period of time is moved to this station G and the battery is charged. It was replaced with a new one and put back into service.
日が ゛ しようとするｐＩ！
しかし、従来のシステムによると、バッテリー交換中は
その無人搬送車を運行系統に投入できないので、上記し
た諸工程を滞りなく円滑に行うためには、バッテリー交
換中の無人搬送車を使えないことをあらかじめ考慮して
それをカバーできるだけの数の無人搬送車が余分に必要
になるばかりでなく、バッテリー交換のために無人搬送
車がバッテリーチェンジャーまで移動する間は、その無
人搬送車が運行系統に投入されている他の無人搬送車の
運行の邪魔になることもある。The day is going to be pI! However, according to the conventional system, the automatic guided vehicle cannot be put into the operation system while the battery is being replaced, so in order to perform the above processes smoothly, it is necessary to make sure that the automatic guided vehicle cannot be used while the battery is being replaced. Not only will an extra number of automated guided vehicles be needed to cover this situation, but the automated guided vehicle will also need to be brought into service while the automated guided vehicle is traveling to the battery changer for battery replacement. It may also interfere with the operation of other automated guided vehicles.
本発明はこのような問題点を解決するものである。即ち
、従来の無人搬送車システムではウェハを処理装置にロ
ード、アンロードする時等の無人搬送車の停止時間がロ
スタイムになっているので、本発明は、そのことに着目
し、そのロスタイムを無人搬送車に搭載しているバッテ
リーの充電のために有効利用することによって、バッテ
リー交換を不要とすると同時にすべての無人搬送車の運
行の効率化を図ることを目的とする。The present invention solves these problems. That is, in conventional automated guided vehicle systems, the stoppage time of the automated guided vehicle when loading and unloading wafers to and from a processing device becomes loss time. By effectively using the batteries installed in guided vehicles to charge them, the aim is to eliminate the need for battery replacement and at the same time improve the efficiency of the operation of all automated guided vehicles.
シ 占を ゛するための
上記目的を達成するため、本発明の無人搬送車システム
は、無人搬送車の停止ポジションに給電部を設ける一方
、この給電部に対して接続切離し自在な受電部を上記無
人搬送車に設け、無人搬送車が停止ポジションに停止し
ている間に上記給電部及び受電部を通して上記バッテリ
ーを充電する点を要旨としている。In order to achieve the above-mentioned object of controlling power consumption, the automatic guided vehicle system of the present invention includes a power feeding section at the stop position of the automatic guided vehicle, and a power receiving section that can be freely connected and disconnected from the power feeding section. The gist of the present invention is to be provided in an automatic guided vehicle, and to charge the battery through the power feeding unit and the power receiving unit while the automatic guided vehicle is stopped at a stop position.
作−且
上記手段において、無人搬送車が停止しているときにそ
の受電部を給電部に接続すれば、その無人搬送車に搭載
しているバッテリーが充電される。無人搬送車が停止す
るポジションは、処理装置にウェハをロード、アンロー
ドするための位置即ちステーション、及び他の無人搬送
車があるために待機を余儀無くされる待機ポジションで
あり、本発明は、このような停止ポジションにおける停
止時間を利用してバッテリーに充電するものであるから
、充電のための時間枠を別途設定する必要がない。In the operation and in the above means, when the automatic guided vehicle is stopped and the power receiving section is connected to the power feeding section, the battery mounted on the automatic guided vehicle is charged. The position where the automatic guided vehicle stops is a station for loading and unloading wafers to a processing device, and a standby position where it is forced to wait because there are other automatic guided vehicles. Since the battery is charged using the stop time at the stop position, there is no need to separately set a time frame for charging.
遺」１舛 以下、本発明の実施例を図面を参照して説明する。1 relic Embodiments of the present invention will be described below with reference to the drawings.
第１図において、２ａ・・・は無人搬送車がウェハを処
理装置Ｘ’ｌ、Ｘ２・・・にロード、アンロードするた
めに停止ポジションに設けられた給電部を示し、２ｂ・
・・は無人搬送車の待機が予想される停止ポジションに
設けられた給電部を示す。第２図には上記した各停止ポ
ジションに設けられた給電部を符号２によって示してお
り、この給電部２はアルミニウムテープＲの近傍の床面
又は側壁面等に設けられ、例えば雌形断面の電源端子２
１゜２１を電源２２に接続してなる。電源端子２１には
平面視丸形のものの他、レール形の比較的長いものを使
用することも可能である。 第２図から類推できるよう
に、無人搬送車１は荷物を格納するキャリヤ（図示省略
）を搭載するための置き台１１を備え、例えば上記キャ
リヤにウェハを格納して特定のステーションまで運び、
そのステーションで処理装置Ｘｉ、Ｘ２・・・にウェハ
をロードしたり、また処理装置から処理済みのウェハを
アンロードしてキャリヤに格納し他のステーションまで
運ぶ。また、無人搬送車ｌには上記した給電部２に対応
して受電部３が設けられる。受電部３は例えば第３図に
示したようにロンド状の端子３１と充電器３２とを備え
、充電器３２が無人搬送車１に搭載されているバフテリ
ー３３に接続されている。上記端子３１は例えばエアシ
リンダによって昇降され、上記した停止ポジションにお
いて端子３１が下降すると受電部２の電源端子２１に接
続し、端子３１が上昇すると電源端子２１から切離され
る。 上記の停止ポジションで、第２図のように無人搬
送車１が停止し、その停止時間中に受電部３の端子３１
が同図下向き矢印のように下降すると、この端子３１が
給電部２の電源端子２１に接続され、バッテリー３３へ
の充電が開始される。バッテリー３３への充電は無人搬
送車１が停止している時間内に限られる。例えば、無人
搬送車１が第１図のステーションＡ−Ｆのうちの特定の
ステーション、例えばステーションＡに到着してからウ
ェハのロードが終わるまで停止しているとすると、バッ
テリー３３への充電は、ウェハのローディングと併行さ
せ、かつ、ウェハのローディングが終わるまでに止める
ことが必要である。他の停止ポジションでの充電につい
ても同様である。In FIG. 1, 2a... indicates a power supply unit provided at a stop position for automatic guided vehicles to load and unload wafers to processing devices X'l, X2..., and 2b...
... indicates a power supply unit installed at a stop position where an automatic guided vehicle is expected to be on standby. In FIG. 2, the power supply section provided at each of the above-described stop positions is indicated by the reference numeral 2. Power terminal 2
1°21 is connected to the power supply 22. In addition to being round in plan view, the power terminal 21 may be rail-shaped and relatively long. As can be inferred from FIG. 2, the automatic guided vehicle 1 is equipped with a stand 11 for mounting a carrier (not shown) for storing cargo, and for example, stores a wafer in the carrier and carries it to a specific station.
At that station, wafers are loaded into processing devices Xi, X2, etc., and processed wafers are unloaded from the processing devices, stored in carriers, and transported to other stations. Further, the automatic guided vehicle 1 is provided with a power receiving section 3 corresponding to the above-described power feeding section 2. For example, as shown in FIG. 3, the power receiving unit 3 includes a terminal 31 in the shape of a rond and a charger 32, and the charger 32 is connected to a battery 33 mounted on the automatic guided vehicle 1. The terminal 31 is raised and lowered by, for example, an air cylinder, and when the terminal 31 is lowered in the above-described stop position, it is connected to the power terminal 21 of the power receiving section 2, and when the terminal 31 is raised, it is disconnected from the power terminal 21. At the above stop position, the automatic guided vehicle 1 stops as shown in FIG.
When the terminal 31 descends as indicated by the downward arrow in the figure, the terminal 31 is connected to the power supply terminal 21 of the power supply section 2, and charging of the battery 33 is started. Charging of the battery 33 is limited to the time when the automatic guided vehicle 1 is stopped. For example, if the automatic guided vehicle 1 stops after arriving at a specific station among stations A to F in FIG. It is necessary to run it concurrently with the loading of the wafer and to stop it before the loading of the wafer is completed. The same applies to charging at other stop positions.
この実施例では、第１図から明らかなように、無人搬送
車の停止ポジションを、処理装置のロード、アンロード
位置と、それらのステーションＡ〜Ｆの両側の待機が予
想される位置とに設定したが、その他の位置に停止ポジ
ションを設定しても差し支えない。この場合は、停止ポ
ジションを設定した位置に給電部を設けておく必要があ
る。また、無人搬送車に搭載したバッテリーは一定時間
内であれば放電量は少ないから、必ずしも停止ポジショ
ンの全部に給電部を設ける必要はなく、そのうちの所定
の停止ポジションのみに給電部を設けておき、充電が必
要になった時点でその停止ポジションで充電を行うよう
にしてもよい。In this embodiment, as is clear from FIG. 1, the automatic guided vehicle is set at the loading/unloading position of the processing device and at the expected waiting positions on both sides of stations A to F. However, there is no problem in setting the stop position at other positions. In this case, it is necessary to provide the power supply section at the position where the stop position is set. In addition, since the battery installed in an automatic guided vehicle has a small amount of discharge within a certain period of time, it is not necessarily necessary to provide a power supply section at all stop positions, but only at predetermined stop positions. , when charging becomes necessary, charging may be performed at that stop position.
光肌公兎果
上記のように、本発明の無人搬送車システムによると、
従来はロスタイムとして消費されていた無人搬送車の停
止時間内にその無人搬送車に搭載したバッテリーが充電
されるので、無人搬送車の停止時間の有効利用が図られ
る。このように無人搬送車の運行中にバッテリーを充電
することにより、従来必要であったバ・ノテリーの交換
が不要になる結果、パンテリチェンジャーが不要になる
ばかりでなく、バッテリーチェンジャーまで移動する無
人搬送車によって他の無人搬送車の運行が邪魔されるこ
とがなくなる。従って、無人搬送車の数を減らすことが
できると同時に、無人搬送車の運行効率を向上すること
ができる。As mentioned above, according to the automatic guided vehicle system of the present invention,
Since the battery mounted on the automatic guided vehicle is charged during the automatic guided vehicle's stop time, which was conventionally consumed as loss time, the automatic guided vehicle's stop time can be used effectively. By charging the battery while the automatic guided vehicle is in operation, it is no longer necessary to replace the battery, which was previously necessary. The transport vehicle does not interfere with the operation of other automatic guided vehicles. Therefore, the number of automatic guided vehicles can be reduced, and at the same time, the operating efficiency of automatic guided vehicles can be improved.
第１図は本発明の無人搬送車システムにおける給電部の
設置位置及びステーションを例示した概略平面図、第２
図はバッテリー充電前の状態を示す一部破断圧面図、第
３図は給電部と受電部を示す説明図、第４図は従来の無
人搬送車システムを示す概略平面図である。
１・・・無人搬送車、２，２ａ、２ｂ・・・給電部、３
・・・受電部、Ａ、Ｂ、Ｃ，Ｄ、Ｅ、Ｆ・・・ステーシ
ョン、Ｘｌ、Ｘ２、Ｘ３・・・処理装置。FIG. 1 is a schematic plan view illustrating the installation position and stations of the power feeding section in the automatic guided vehicle system of the present invention, and FIG.
The figure is a partially cutaway pressure surface view showing the state before charging the battery, FIG. 3 is an explanatory view showing a power feeding section and a power receiving section, and FIG. 4 is a schematic plan view showing a conventional automatic guided vehicle system. 1... Automatic guided vehicle, 2, 2a, 2b... Power feeding part, 3
... Power receiving unit, A, B, C, D, E, F... Station, Xl, X2, X3... Processing device.
Claims (1)
複数のステーション間で運行し、各ステーションで処理
装置にワークのロード、アンロードを行う無人搬送シス
テムにおいて、 無人搬送車の停止ポジションに給電部を設ける一方、こ
の給電部に対して接続切離し自在な受電部を上記無人搬
送車に設け、無人搬送車が停止ポジションに停止してい
る間に上記給電部及び受電部を通じて上記バッテリーを
充電することを特徴とする無人搬送システム。(1) In an automated guided vehicle system that operates an automated guided vehicle equipped with a battery as a driving source between multiple stations and loads and unloads workpieces to processing equipment at each station, power is supplied to the stopped position of the automated guided vehicle. The automatic guided vehicle is provided with a power receiving section that can be freely connected to and disconnected from the power feeding section, and the battery is charged through the power feeding section and the power receiving section while the automated guided vehicle is stopped at a stop position. An unmanned transportation system characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60235897A JPS6295904A (en) | 1985-10-21 | 1985-10-21 | Unmanned carrier system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60235897A JPS6295904A (en) | 1985-10-21 | 1985-10-21 | Unmanned carrier system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6295904A true JPS6295904A (en) | 1987-05-02 |
Family
ID=16992855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60235897A Pending JPS6295904A (en) | 1985-10-21 | 1985-10-21 | Unmanned carrier system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6295904A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008236997A (en) * | 2007-03-23 | 2008-10-02 | Nissan Diesel Motor Co Ltd | Unmanned carrier and transportation system |
| WO2024090572A1 (en) * | 2022-10-27 | 2024-05-02 | ソフトバンクグループ株式会社 | Picking system, cart robot, method, and program |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4854607A (en) * | 1971-11-11 | 1973-08-01 | ||
| JPS5136659U (en) * | 1974-09-10 | 1976-03-18 |
-
1985
- 1985-10-21 JP JP60235897A patent/JPS6295904A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4854607A (en) * | 1971-11-11 | 1973-08-01 | ||
| JPS5136659U (en) * | 1974-09-10 | 1976-03-18 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008236997A (en) * | 2007-03-23 | 2008-10-02 | Nissan Diesel Motor Co Ltd | Unmanned carrier and transportation system |
| WO2024090572A1 (en) * | 2022-10-27 | 2024-05-02 | ソフトバンクグループ株式会社 | Picking system, cart robot, method, and program |
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