JPS6295712U - - Google Patents

Info

Publication number
JPS6295712U
JPS6295712U JP18713885U JP18713885U JPS6295712U JP S6295712 U JPS6295712 U JP S6295712U JP 18713885 U JP18713885 U JP 18713885U JP 18713885 U JP18713885 U JP 18713885U JP S6295712 U JPS6295712 U JP S6295712U
Authority
JP
Japan
Prior art keywords
hood
manufacturing equipment
semiconductor manufacturing
blower fan
platform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18713885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18713885U priority Critical patent/JPS6295712U/ja
Publication of JPS6295712U publication Critical patent/JPS6295712U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Prevention Of Fouling (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP18713885U 1985-12-04 1985-12-04 Pending JPS6295712U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18713885U JPS6295712U (US07923587-20110412-C00022.png) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18713885U JPS6295712U (US07923587-20110412-C00022.png) 1985-12-04 1985-12-04

Publications (1)

Publication Number Publication Date
JPS6295712U true JPS6295712U (US07923587-20110412-C00022.png) 1987-06-18

Family

ID=31137334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18713885U Pending JPS6295712U (US07923587-20110412-C00022.png) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPS6295712U (US07923587-20110412-C00022.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111664106A (zh) * 2019-03-08 2020-09-15 北京北方华创微电子装备有限公司 风机控制方法及风机控制装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111664106A (zh) * 2019-03-08 2020-09-15 北京北方华创微电子装备有限公司 风机控制方法及风机控制装置

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