JPS6294636U - - Google Patents
Info
- Publication number
- JPS6294636U JPS6294636U JP18625885U JP18625885U JPS6294636U JP S6294636 U JPS6294636 U JP S6294636U JP 18625885 U JP18625885 U JP 18625885U JP 18625885 U JP18625885 U JP 18625885U JP S6294636 U JPS6294636 U JP S6294636U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- orientation flat
- detection section
- section
- alignment point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18625885U JPS6294636U (en:Method) | 1985-12-03 | 1985-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18625885U JPS6294636U (en:Method) | 1985-12-03 | 1985-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294636U true JPS6294636U (en:Method) | 1987-06-17 |
Family
ID=31135650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18625885U Pending JPS6294636U (en:Method) | 1985-12-03 | 1985-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294636U (en:Method) |
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1985
- 1985-12-03 JP JP18625885U patent/JPS6294636U/ja active Pending