JPS6294552U - - Google Patents
Info
- Publication number
- JPS6294552U JPS6294552U JP18764985U JP18764985U JPS6294552U JP S6294552 U JPS6294552 U JP S6294552U JP 18764985 U JP18764985 U JP 18764985U JP 18764985 U JP18764985 U JP 18764985U JP S6294552 U JPS6294552 U JP S6294552U
- Authority
- JP
- Japan
- Prior art keywords
- current
- ion pump
- power supply
- air cooling
- sputtering ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 108010083687 Ion Pumps Proteins 0.000 claims 4
- 238000004544 sputter deposition Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18764985U JPH0322847Y2 (https=) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18764985U JPH0322847Y2 (https=) | 1985-12-04 | 1985-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6294552U true JPS6294552U (https=) | 1987-06-16 |
| JPH0322847Y2 JPH0322847Y2 (https=) | 1991-05-17 |
Family
ID=31138301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18764985U Expired JPH0322847Y2 (https=) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322847Y2 (https=) |
-
1985
- 1985-12-04 JP JP18764985U patent/JPH0322847Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322847Y2 (https=) | 1991-05-17 |