JPS6294552U - - Google Patents

Info

Publication number
JPS6294552U
JPS6294552U JP18764985U JP18764985U JPS6294552U JP S6294552 U JPS6294552 U JP S6294552U JP 18764985 U JP18764985 U JP 18764985U JP 18764985 U JP18764985 U JP 18764985U JP S6294552 U JPS6294552 U JP S6294552U
Authority
JP
Japan
Prior art keywords
current
ion pump
power supply
air cooling
sputtering ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18764985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18764985U priority Critical patent/JPH0322847Y2/ja
Publication of JPS6294552U publication Critical patent/JPS6294552U/ja
Application granted granted Critical
Publication of JPH0322847Y2 publication Critical patent/JPH0322847Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP18764985U 1985-12-04 1985-12-04 Expired JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18764985U JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18764985U JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-12-04 1985-12-04

Publications (2)

Publication Number Publication Date
JPS6294552U true JPS6294552U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-16
JPH0322847Y2 JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-17

Family

ID=31138301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18764985U Expired JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0322847Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-17

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