JPS6294551U - - Google Patents
Info
- Publication number
- JPS6294551U JPS6294551U JP18743085U JP18743085U JPS6294551U JP S6294551 U JPS6294551 U JP S6294551U JP 18743085 U JP18743085 U JP 18743085U JP 18743085 U JP18743085 U JP 18743085U JP S6294551 U JPS6294551 U JP S6294551U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- hub
- wafer
- stand
- cooling passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18743085U JPS6294551U (enExample) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18743085U JPS6294551U (enExample) | 1985-12-04 | 1985-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294551U true JPS6294551U (enExample) | 1987-06-16 |
Family
ID=31137900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18743085U Pending JPS6294551U (enExample) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294551U (enExample) |
-
1985
- 1985-12-04 JP JP18743085U patent/JPS6294551U/ja active Pending