JPS6294334U - - Google Patents

Info

Publication number

JPS6294334U

JPS6294334U JP1985185481U JP18548185U JPS6294334U JP S6294334 U JPS6294334 U JP S6294334U JP 1985185481 U JP1985185481 U JP 1985185481U JP 18548185 U JP18548185 U JP 18548185U JP S6294334 U JPS6294334 U JP S6294334U

Authority

JP

Japan

Prior art keywords

mask substrate

thin film

glass plate

utility

well

Prior art date

1985-12-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 5
• 239000010409 thin film Substances 0.000 claims description 4
• 239000011521 glass Substances 0.000 claims description 2
• 238000000034 method Methods 0.000 description 2
• 238000005530 etching Methods 0.000 description 1
• 238000012544 monitoring process Methods 0.000 description 1