JPS6293490A - Screw vacuum pump - Google Patents

Abstract

PURPOSE:To simplify the maintenance works of a screw vacuum pump, by disposing a discharge opening in the vertically downward direction, disposing two discharge openings which communicate with the discharge opening in the perpendicularly horizontal direction, and enabling the piping to a discharge opening being easy to be worked corresponding to the arrangement of the vacuum pump in a pump chamber. CONSTITUTION:A rotor 1 rotates by the driving of a gear 7, and a gas is taken in through an intake opening 8 and is discharged for the side of the atmosphere from discharge openings. A discharge opening 9 is disposed in the downward direction, discharge openings 10a, 10b are disposed horizontally and in the perpendicular direction of the discharge opening 9, and total three discharge openings are provided. In case that the wall of a pump chamber is located on the side of the discharge opening 10b, stop flanges 13, 14 are attached to the unnecessary discharge openings 9, 10b so as to pipeline in the direction of the discharge opening 10a and enable to discharge. And in case that deposits and the like are stored at the discharge opening, the deposits can be blown toward a pipe 15 by removing the flange 13 or the flange 14 and blowing a gas into therefrom without removing the pipe 15 and cleaning the inside. Thus, pipelining works and maintenance works become very easy, furthermore, the structure as a two stage machine is enabled easily.

Description

[Detailed description of the invention] [Field of application of the invention] The present invention relates to screw vacuum pumps.

[The back of invention]

The screw fluid machine of the present invention, number 9, which is a screw fluid machine, has a structure closest to that of an empty pump, as disclosed in Japanese Patent Publication No. 5fl-H17'72. One discharge passage 1 is not provided at the vertical bottom of the casing. Therefore, when connecting piping in the f-field or on-site, you have to insert your hand into the lower part of the machine body and connect the piping by hand each time, which reduces work efficiency. In particular, the pump chamber of the semiconductor manufacturing equipment line is narrow due to the equipment, so the positional relationship between the discharge [1] and the other piping further deteriorates work efficiency. Deposits accumulate at the discharge port of the pump due to the gas being handled, and in order to periodically clean the deposits, the piping at the discharge port is removed each time for maintenance. The drawback was that it was extremely difficult to get into.

[Object of the Invention] An object of the present invention is to provide a vacuum pump that allows discharge piping connection work and maintenance work in a factory or on-site to be done inexpensively and speedily.

[Summary of the invention]

The feature of the present invention is that the discharge port passage of the pump body is arranged in two places in the horizontal direction perpendicular to the downward direction, in addition to the conventional vertical downward direction, thereby making it possible to connect the discharge piping downward. This makes it possible to connect piping to the discharge port that is easy to work with depending on the arrangement of the vacuum pump in the pump chamber.Additionally, depending on the gas used in semiconductor manufacturing equipment, deposits may form at the vacuum pump discharge port. Since this requires a mincing operation to blow the hair away, in this case as well, discharge in three directions "1
If this is provided, the deposits can be blown away by injecting fluid from one of the remaining two leaves 11 without removing the discharge piping. In addition, if you want to lower the empty pressure and use a two-stage direct air pump, you can consider a two-stage stacking method that does not increase the installation floor space. 1 makes it easy to build two-tiered piping.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. An example in which each of the present inventions is implemented in a screw vacuum pump, FIG. 1 is a longitudinal sectional view of the screw vacuum pump,
FIG. 2 is a sectional view taken along the line A-A in FIG. 1. 1 pair of female and male rotors, 5 and 6 are bearings that support the rotors, 2 and 3 degrees 4 are casings that house the rotors and bearings,
8 suction [discharge at 1 "1 is 9 downwards 10a, J, O
A total of three locations are provided horizontally in the direction perpendicular to b. 7
By assisting this gear with the gear S' (the drive part is not shown), the rotor rotates and the suction port 8 (vacuum side)
1; Suction gas and discharge port 9 or 10a, fo
Gas is discharged to the atmosphere from b.

In FIG. 4, the gas discharged from discharge boats 128 and 12b is discharged through discharge passages 9 and 10a.

It has a structure that allows it to be discharged even from the wrong side of 10b. In Figure 1, the piping connection is made towards the discharge rl 10a.
(For example, when there is a wall of the pump chamber on the side of the discharge port 10b), unnecessary discharge 11'+1
-'t 0 , 10 b niit, stop flange 9.1
0 and piped in the direction of 10a so that it can be discharged. If there is a pump chamber wall or the like on the discharge rl 10 a side, connect the stopper 7 flange 14 to the discharge port 10.
It is sufficient to install the pipes on the side 10a and to discharge from the side 10b.

In addition, if the above-mentioned deposits etc. accumulate in the discharge passage [1], do not remove the pipe 15 and clean the inside, but remove the opening flange 13 or 14 and blow gas from the removed place. 1? You should be able to blow away the deposits towards I Fi.

Further, a cross-sectional view of the embodiment when combined as a two-stage machine is shown in Figure 3. As shown in this figure, in the case of a two-stage machine, the discharge 11% l-11+1 n, 10 b is closed with a flange and the discharge [-■] is connected to the suction port 8 on the second stage side;
If you do this, you can configure it as a two-stage machine without changing the installation floor space. 2nd stage side discharge [-1 is 7 (discharge direction can be freely selected) as mentioned above.

As explained above, according to this embodiment, piping work and maintenance work are extremely easy, and the configuration as a two-stage machine is also possible. There is an effect that can be achieved by f nl-.

[Effects of the Invention] As described above, according to the present invention, by arranging the discharge direction of the screw vacuum pump in the vertical F direction and the total of two locations in the water direction iJi perpendicular thereto: i) r, the following can be achieved. You can get the effect.

(1) On-site piping work can be done cheaply and quickly.

(2) Maintenance work can be done easily.

(3) It is easy to configure as a two-stage machine.

[Brief explanation of drawings]

FIG. 2 is a longitudinal cross-sectional view when the method is implemented as a two-stage machine.

Claims (1)

[Claims] A screw vacuum pump consisting of a male rotor, a female rotor, bearings that support them, and a casing that houses them, characterized in that the discharge ports are arranged in one location vertically downward and in two locations communicating with the discharge ports in the perpendicular horizontal direction. Screw vacuum pump.