JPS6292647U - - Google Patents
Info
- Publication number
- JPS6292647U JPS6292647U JP18586085U JP18586085U JPS6292647U JP S6292647 U JPS6292647 U JP S6292647U JP 18586085 U JP18586085 U JP 18586085U JP 18586085 U JP18586085 U JP 18586085U JP S6292647 U JPS6292647 U JP S6292647U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder base
- stopper
- clamp plate
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18586085U JPS6292647U (de) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18586085U JPS6292647U (de) | 1985-12-02 | 1985-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292647U true JPS6292647U (de) | 1987-06-13 |
Family
ID=31134881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18586085U Pending JPS6292647U (de) | 1985-12-02 | 1985-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292647U (de) |
-
1985
- 1985-12-02 JP JP18586085U patent/JPS6292647U/ja active Pending