JPS6292639U - - Google Patents
Info
- Publication number
- JPS6292639U JPS6292639U JP18371285U JP18371285U JPS6292639U JP S6292639 U JPS6292639 U JP S6292639U JP 18371285 U JP18371285 U JP 18371285U JP 18371285 U JP18371285 U JP 18371285U JP S6292639 U JPS6292639 U JP S6292639U
- Authority
- JP
- Japan
- Prior art keywords
- process tube
- cross
- pentagonal
- section
- polygonal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18371285U JPS6292639U (enExample) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18371285U JPS6292639U (enExample) | 1985-11-29 | 1985-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292639U true JPS6292639U (enExample) | 1987-06-13 |
Family
ID=31130701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18371285U Pending JPS6292639U (enExample) | 1985-11-29 | 1985-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292639U (enExample) |
-
1985
- 1985-11-29 JP JP18371285U patent/JPS6292639U/ja active Pending