JPS6292108A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To facilitate lead wire connection processing by adopting the structure that a terminal of a conductor coil of a film face sliding head is exposed in the opposite side to the slide face. CONSTITUTION:The magnetic core is clipped vertically by two kinds of nonmagnetic members; the slide face side is a nonmagnetic slide member 7 and the terminal extracting side is a nonmagnetic reinforcement member 8. The nonmagnetic slide member 7 restricts the shape of front cores 1, 2 at the slide face 23. The nonmagnetic reinforcement member 8, a rear core 3 and an insulation film 6 are removed at the terminal 5a of the conductor coil 5 to form a notch 22 and the terminal part 5a of the conductor coil is opened toward the upper face. The terminal part 5a of the conductor coil of the thin film head 12 is placed at the opposite side to the head slide face side. Thus, the swelling at the connecting point and the wiring of leads 11 give no hindrance at head sliding.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thin film head for a VTR or the like, and particularly to a head structure suitable for connecting signal coil lead wires in a multi-element structure.

[Background of the invention]

Conventionally, magnetic thin film is used as the core material, and thin film formation technology and
Various methods and head structures for manufacturing high-performance, high-precision thin-film magnetic heads using IJ technology have been proposed. Among them, JP-A-55-132519, JP-A-58
The head structure disclosed in No. 13712j is such that a lower core, a signal coil, and an upper core are laminated in the order of thin films on a substrate, and a gap is sandwiched in the middle of the upper core to cross the core perpendicular to the substrate surface. , called a membrane sliding head or horizontal head. The features of this head are as follows.

(1) Track width, gap length, gap depth, etc., which are important in the head-If method, are determined by photoresolution technology JP8.
High precision can be achieved with 3 controls.

(2) Multiple elements can be formed on a wafer substrate in the same way, and the track width and azimuth angle of each gap can be arranged arbitrarily, making it suitable for multi-track heads. There is no mention of connecting lead wires from the terminals, but when applying to a VTR or the like, the raised parts of the terminal connections must not come into contact with the tape and impede its sliding. However, in reality, the permissible value of the bulge is around 10 μm, and it is very difficult to connect on the top surface of the terminal. As a countermeasure,
Possible methods include using a tapered board to increase the allowable height of the terminal area, and using a through-hole board and pulling out from the back of the board, but both methods were technically difficult and the practical use of the head was refused. .

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a thin film magnetic head which eliminates the drawbacks of the prior art described above and facilitates lead wire processing of a film surface sliding head.

[Summary of the invention]

In order to achieve this object, the present invention focuses on the fact that the drawback of conventional thin film magnetic heads is that the exposed surface of the coil terminal and the head sliding surface are on the same side, and They are characterized by having a structure in which they are located on opposite sides of each other, and can be easily connected using normal board and lead wire processing methods.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1(α) is an external perspective view showing an embodiment of the thin film magnetic head according to the present invention, and FIG. 1(-8) is the double-dot chain l1lA
- A sectional view taken along A', the lower part of the drawing is the head sliding surface 23, and the first and second front cores 1 as magnetic cores.
, 2 and the rear core 3 form a closed magnetic path, and a gap 4 is sandwiched between the pair of front cores 1 and 2. A conductor coil 5 interlinking with the closed magnetic path passes through the center of the closed magnetic path.

The conductor coil 5 and each magnetic core are insulated via an insulation g1.6. These magnetic cores are sandwiched between two types of non-magnetic materials in the vertical direction, and the sliding surface side is made of non-magnetic sliding material 7.
A non-magnetic reinforcing material 8 is provided on the terminal extraction side. The non-magnetic sliding material 7 regulates the shape of the front cores 1 and 2 on the sliding surface 25. At the terminal portion 5α of the conductor coil 5, the non-magnetic reinforcing material 8, the rear core 3 and the insulating film 6 are removed to form the notch 2.
2, and the terminal portion 5α of the conductor coil is open on the upper surface side.

Further, a support plate 9 is attached on the non-magnetic reinforcing material 8, and a terminal plate 10 provided on the support plate 9 and a terminal portion 5α of the conductor coil are attached.
A lead wire 11 is used to connect between them.

Furthermore, each part will be explained in detail. Front core 1, 2
The rear core 3 is made of a soft magnetic thin film, and is made of an amorphous alloy or sendust alloy and has a thickness of 10 to 30 μm. Gap 4 is 0.2 to 0.33 at S00zFIA
It is the film thickness. The conductor coil 5 is made of copper and aluminum,
It is formed to have a thickness of 1 to 5 μm and a width of 10 to 50 μm. An S02 film was used as the insulating film B. As the non-magnetic sliding material 7, a ceramic material, a glass material, or a thin film thereof having good wear resistance is used, and for example, a forsterite film is suitable. The thickness of the non-magnetic sliding material 7 was greater than the gap depth, that is, the thickness of the front cores 1 and 2, and was 50 μm in the example. The shape of the sliding surfaces of the front cores 1 and 2 has a sliding length of 20 to 5.
0 μm, ) rank width was 60 μm. The non-magnetic reinforcing material 8 uses a non-magnetic film, for example, a forsterite film of 10 to 5
A thickness of 0 μm was formed. The support plate 9, which can omit the non-magnetic reinforcing material 8, is made of a brass block, and a terminal plate 10 is attached to the side surface of the support plate 9, and a lead wire 11 is connected by soldering or wire bonding.

According to this structure, the terminal portion 5α of the conductor coil of the thin film head 12 is located on the side opposite to the head sliding surface side. Therefore, the bulge at the connection point and the routing of the lead wire 11 do not pose any hindrance when the head slides.

FIGS. 2(a) to 2(C) show another embodiment of the thin film magnetic head of the present invention, FIGS. 2(a) and 2(b) are cross-sectional views, and FIG. 1 is a structural diagram showing the non-magnetic reinforcing material 8 in FIG. 1, with the non-magnetic sliding material 7 omitted in FIG. Since these non-magnetic materials 7 and 8 serve to hold the magnetic core, there is no difference in practical use even if one of them is removed. Moreover, in FIG. 2(C), the terminal portion 5a of the conductor coil is set to σ1 by the non-magnetic reinforcing material 8, and the area of the terminal portion 5α can be increased, making it easy to connect the lead wire. . Further, in this embodiment, the manufacturing process is simplified because the rounded notch 22 provided in the embodiment shown in FIG. 1 is not provided.

FIG. 3 shows still another embodiment of the thin film magnetic head according to the present invention, in which (α) shows the front core 1,
2 is a perspective view of the head sliding surface side surrounded by a non-magnetic sliding material 7.7α. According to this, not only is the front core held more firmly, but also the narrow track width head? This structure is effective in meeting the demand for multi-element devices. Figures 2 (75) and (C) show other specific examples of the shape of the ridge line 16 of the front core on the sliding surface; (c) is serrated. In this way, it is possible to eliminate the so-called contour effect, which is the interference of the reproduction output with respect to a specific recording wavelength.

FIG. 4 is a perspective view of a main part showing still another embodiment of the thin film magnetic head according to the present invention. This embodiment is a multi-element thin film magnetic head, and (α) in the figure shows the sliding surface; b) shows the lead wire connection state. In FIG. 4, four elements 12 are arranged with the gap 4 shifted two-dimensionally.
This is suitable for PCM recording.

FIG. 5 shows still another embodiment of the thin film magnetic head according to the present invention, in which a step-up transformer 17 is incorporated. Figures (a) and (b) are a perspective view and a sectional view when the thin film transformer 174 is formed integrally with the head element in close proximity to it. The thin film transformer 17α is composed of a lower core 14, an upper core 15, a secondary film 16α and a secondary coil 16h, and these core films can be formed in exactly the same manner as the thin film magnetic head element. The terminal of the secondary coil 16b is connected to the terminal plate 10 by a lead wire 11, but in this case as well, the presence of the step-up transformer 17 and the lead wire 11 does not impede head sliding. FIG. 2C shows a case where the step-up transformer 17 is mounted as individual parts on the support plate 9, where 18α is the input side terminal and 18b is the output side terminal. In this way, in the thin film magnetic head of the present invention, step-up transformers can be freely arranged and configured.

FIG. 6 shows a method of manufacturing a thin film magnetic head according to the present invention. To explain this in order, (α) the substrate 20 is prepared. The material may be either magnetic or non-magnetic.

(,!,) Forming the non-magnetic sliding material 7 on the substrate 20,
Create a groove 21. The groove slope 13 preferably has an inclination of about 45°, and if the sliding surface shape shown in FIG.

In addition, when the substrate 20 is non-magnetic, the non-magnetic sliding material 7 is the substrate 20.
The same material may be used, in which case the grooves are formed by machining or etching.

(C) The first front core 1 is formed on one side with the center line of the groove 21 as the boundary. The core material is formed into a thin film by sputtering an amorphous alloy or sendust alloy. Since the boundary line will later become the gap surface, it is best to finish it by ion milling or mechanical cutting.

(d) A milk 02 film is applied as the gap material 4.

(e) Form the second front core 2 on the remaining half. At this time, the core deposited on the first front core 1 is removed.

(1) 5=02 is deposited as the insulating film 6, and the conductor coil 5 is formed on 2. Furthermore, an insulating film 6 is deposited on the upper surface.

<g) Form the rear core 3. In this case, mask sputtering is effective so that notches 22 are formed at both ends of the conductor coil 5.

<A) A non-magnetic reinforcing material 8 is adhered, and a support plate 9 is placed on top of the non-magnetic reinforcing material 8.
Attach it by dipping.

(1) Internally polish the sliding surface 23 side, remove the substrate 20 portion, and expose the front cores 1, 2 and the gap 4. When pasting the terminal board 10, connect the lead wire 1 between it and the conductor coil 5.
Connect at 1.

The manufacturing method described above is very different from the conventional manufacturing method, in which the front core is sandwiched with a gap on the board.

It is characterized by the fact that the coil and the rear core are formed in that order, that is, from the part closest to the sliding surface, and in the final step, the substrate part is removed to expose the front core with the gap between them on the active surface. The method of manufacturing the opening facilitates the connection of the lead wires described in each of the above embodiments.

〔Effect of the invention〕

As explained above, according to the present invention, since the terminal of the conductor coil of the membrane surface (sliding type) has a U-shaped structure on the side opposite to the active surface, the lead wire connection process is facilitated and the head Promote practical application.

In addition, the desired head structure can be easily realized using a manufacturing method that only requires changing the order of the steps within the scope of conventional existing technology.
In addition, it is possible to promote single production, and to provide a thin-film magnetic head with excellent functions and a method for manufacturing the same, which eliminates the drawbacks of the prior art mentioned above.

[Brief explanation of drawings]

FIG. 1 shows an embodiment of a thin film magnetic head according to the present invention, in which (a) is a perspective view, and FIG. , FIG. 2 shows another embodiment of the thin-film magnetic head according to the present invention, and FIG.
α) 1 body) is a sectional view with different members omitted, Figure 3 (C) is an external view, Figure 3 is an embodiment of the R-film magnetic head according to the present invention, and Figure 3 (L (6) is a perspective view of the same figure. (C) is a perspective view of an active surface portion having a different shape, and FIG. 5 is a perspective view of the active surface, FIG. 5 is a perspective view of the lead wire connection part, and FIG. ) is a perspective view;
1 to 2 are perspective views showing states in each step of the method for manufacturing a thin film magnetic head according to the present invention. 1.2...Front core, 3...Rear core, 4.
...Gap, 5...Conductor coil, 7
．． 8... Non-magnetic phase, 9... Support plate, 10
...Terminal board, 11...Lead wire. Representative Patent Attorney Masaru Ogawa "Male, engraving of page 41 (content changed; knee 1.), Figure 7 (0-) (1,) 2z C■ (g) (risuji 31 (shi)) 4η 躬 5 圀 60 手 ITO SELLING AMENDMENT BOOK (SYSTEM) ! 1 ``Display of f student Showa 6Q 11 = -Special 11' ``Gan No. 122453
Name of invention No. 1 Rei with each +tr+ that puts heavy pressure on the film magnetic head Patent applicant'l'F'5IQBI ceremony? 1 Address address agent

Claims (5)

[Claims] (1) In a thin-film magnetic head that has a laminated structure of a front core made of a magnetic thin film, a thin-film conductor coil, and a rear core made of a magnetic thin film in order from the sliding surface side with a gap in between,
A thin film magnetic head characterized in that both ends of the conductor coil are exposed on the opposite side from the sliding surface. (2) A non-magnetic material is provided in contact with at least one of the front core and the rear core, and lead wires are connected and drawn out at both exposed ends of the conductor coil. The thin film magnetic head described in Section 1. (3) A multi-element structure is obtained by integrating a plurality of thin-film magnetic head elements surrounding the front core with a non-magnetic material within the sliding surface.
) The thin film magnetic head described in item 2. (4) Claim (1) characterized in that a step-up transformer is connected to both ends of the conductor coil.
The thin film magnetic head described in items (3) to (3) above. (5) The thin-film magnetic head according to claim (4), wherein the step-up transformer includes a magnetic thin-film core and a thin-film coil, and is integrated with the thin-film magnetic head element.