JPS6291248U - - Google Patents
Info
- Publication number
- JPS6291248U JPS6291248U JP18253585U JP18253585U JPS6291248U JP S6291248 U JPS6291248 U JP S6291248U JP 18253585 U JP18253585 U JP 18253585U JP 18253585 U JP18253585 U JP 18253585U JP S6291248 U JPS6291248 U JP S6291248U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- film
- ion
- sensor
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 6
- 230000005669 field effect Effects 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18253585U JPS6291248U (enExample) | 1985-11-26 | 1985-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18253585U JPS6291248U (enExample) | 1985-11-26 | 1985-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6291248U true JPS6291248U (enExample) | 1987-06-11 |
Family
ID=31128422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18253585U Pending JPS6291248U (enExample) | 1985-11-26 | 1985-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6291248U (enExample) |
-
1985
- 1985-11-26 JP JP18253585U patent/JPS6291248U/ja active Pending