JPS6289505U - - Google Patents

Info

Publication number
JPS6289505U
JPS6289505U JP18083885U JP18083885U JPS6289505U JP S6289505 U JPS6289505 U JP S6289505U JP 18083885 U JP18083885 U JP 18083885U JP 18083885 U JP18083885 U JP 18083885U JP S6289505 U JPS6289505 U JP S6289505U
Authority
JP
Japan
Prior art keywords
diaphragm
chamber
separated
case
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18083885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326326Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18083885U priority Critical patent/JPH0326326Y2/ja
Publication of JPS6289505U publication Critical patent/JPS6289505U/ja
Application granted granted Critical
Publication of JPH0326326Y2 publication Critical patent/JPH0326326Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP18083885U 1985-11-26 1985-11-26 Expired JPH0326326Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18083885U JPH0326326Y2 (enrdf_load_html_response) 1985-11-26 1985-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18083885U JPH0326326Y2 (enrdf_load_html_response) 1985-11-26 1985-11-26

Publications (2)

Publication Number Publication Date
JPS6289505U true JPS6289505U (enrdf_load_html_response) 1987-06-08
JPH0326326Y2 JPH0326326Y2 (enrdf_load_html_response) 1991-06-07

Family

ID=31125161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18083885U Expired JPH0326326Y2 (enrdf_load_html_response) 1985-11-26 1985-11-26

Country Status (1)

Country Link
JP (1) JPH0326326Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0326326Y2 (enrdf_load_html_response) 1991-06-07

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