JPS6289136U - - Google Patents

Info

Publication number
JPS6289136U
JPS6289136U JP17983485U JP17983485U JPS6289136U JP S6289136 U JPS6289136 U JP S6289136U JP 17983485 U JP17983485 U JP 17983485U JP 17983485 U JP17983485 U JP 17983485U JP S6289136 U JPS6289136 U JP S6289136U
Authority
JP
Japan
Prior art keywords
semiconductor factory
indicator light
film
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17983485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17983485U priority Critical patent/JPS6289136U/ja
Publication of JPS6289136U publication Critical patent/JPS6289136U/ja
Pending legal-status Critical Current

Links

JP17983485U 1985-11-25 1985-11-25 Pending JPS6289136U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17983485U JPS6289136U (no) 1985-11-25 1985-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17983485U JPS6289136U (no) 1985-11-25 1985-11-25

Publications (1)

Publication Number Publication Date
JPS6289136U true JPS6289136U (no) 1987-06-08

Family

ID=31123244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17983485U Pending JPS6289136U (no) 1985-11-25 1985-11-25

Country Status (1)

Country Link
JP (1) JPS6289136U (no)

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