JPS6288750U - - Google Patents
Info
- Publication number
- JPS6288750U JPS6288750U JP17908585U JP17908585U JPS6288750U JP S6288750 U JPS6288750 U JP S6288750U JP 17908585 U JP17908585 U JP 17908585U JP 17908585 U JP17908585 U JP 17908585U JP S6288750 U JPS6288750 U JP S6288750U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering target
- diameter
- groove ring
- peripheral surface
- inner peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005477 sputtering target Methods 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 3
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17908585U JPH0238931Y2 (https=) | 1985-11-22 | 1985-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17908585U JPH0238931Y2 (https=) | 1985-11-22 | 1985-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6288750U true JPS6288750U (https=) | 1987-06-06 |
| JPH0238931Y2 JPH0238931Y2 (https=) | 1990-10-19 |
Family
ID=31121825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17908585U Expired JPH0238931Y2 (https=) | 1985-11-22 | 1985-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238931Y2 (https=) |
-
1985
- 1985-11-22 JP JP17908585U patent/JPH0238931Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238931Y2 (https=) | 1990-10-19 |