JPS6288671U - - Google Patents

Info

Publication number

JPS6288671U

JPS6288671U JP18110685U JP18110685U JPS6288671U JP S6288671 U JPS6288671 U JP S6288671U JP 18110685 U JP18110685 U JP 18110685U JP 18110685 U JP18110685 U JP 18110685U JP S6288671 U JPS6288671 U JP S6288671U

Authority

JP

Japan

Prior art keywords

peripheral edge

diaphragm

piston member

inner peripheral

center plate

Prior art date

1985-11-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000002093 peripheral effect Effects 0.000 claims description 6
• 238000007789 sealing Methods 0.000 claims description 2

Cited By (1)