JPS6287781U - - Google Patents

Info

Publication number
JPS6287781U
JPS6287781U JP17766385U JP17766385U JPS6287781U JP S6287781 U JPS6287781 U JP S6287781U JP 17766385 U JP17766385 U JP 17766385U JP 17766385 U JP17766385 U JP 17766385U JP S6287781 U JPS6287781 U JP S6287781U
Authority
JP
Japan
Prior art keywords
coating material
chamber
extrusion piston
passage
filling chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17766385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17766385U priority Critical patent/JPS6287781U/ja
Publication of JPS6287781U publication Critical patent/JPS6287781U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP17766385U 1985-11-19 1985-11-19 Pending JPS6287781U (US07968547-20110628-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17766385U JPS6287781U (US07968547-20110628-C00004.png) 1985-11-19 1985-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17766385U JPS6287781U (US07968547-20110628-C00004.png) 1985-11-19 1985-11-19

Publications (1)

Publication Number Publication Date
JPS6287781U true JPS6287781U (US07968547-20110628-C00004.png) 1987-06-04

Family

ID=31119075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17766385U Pending JPS6287781U (US07968547-20110628-C00004.png) 1985-11-19 1985-11-19

Country Status (1)

Country Link
JP (1) JPS6287781U (US07968547-20110628-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244618A (ja) * 1988-03-25 1989-09-29 Tokyo Electron Ltd 処理液供給方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244618A (ja) * 1988-03-25 1989-09-29 Tokyo Electron Ltd 処理液供給方法

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