JPS6287440U - - Google Patents

Info

Publication number
JPS6287440U
JPS6287440U JP17960285U JP17960285U JPS6287440U JP S6287440 U JPS6287440 U JP S6287440U JP 17960285 U JP17960285 U JP 17960285U JP 17960285 U JP17960285 U JP 17960285U JP S6287440 U JPS6287440 U JP S6287440U
Authority
JP
Japan
Prior art keywords
clampers
probe card
actuator
guide
fixing mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17960285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037955Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17960285U priority Critical patent/JPH037955Y2/ja
Priority to US06/928,502 priority patent/US4721198A/en
Publication of JPS6287440U publication Critical patent/JPS6287440U/ja
Application granted granted Critical
Publication of JPH037955Y2 publication Critical patent/JPH037955Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17960285U 1985-11-13 1985-11-21 Expired JPH037955Y2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17960285U JPH037955Y2 (enrdf_load_stackoverflow) 1985-11-21 1985-11-21
US06/928,502 US4721198A (en) 1985-11-13 1986-11-07 Probe card clamping and changing mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17960285U JPH037955Y2 (enrdf_load_stackoverflow) 1985-11-21 1985-11-21

Publications (2)

Publication Number Publication Date
JPS6287440U true JPS6287440U (enrdf_load_stackoverflow) 1987-06-04
JPH037955Y2 JPH037955Y2 (enrdf_load_stackoverflow) 1991-02-27

Family

ID=31122805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17960285U Expired JPH037955Y2 (enrdf_load_stackoverflow) 1985-11-13 1985-11-21

Country Status (1)

Country Link
JP (1) JPH037955Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH037955Y2 (enrdf_load_stackoverflow) 1991-02-27

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