JPS6287435U - - Google Patents
Info
- Publication number
- JPS6287435U JPS6287435U JP17942085U JP17942085U JPS6287435U JP S6287435 U JPS6287435 U JP S6287435U JP 17942085 U JP17942085 U JP 17942085U JP 17942085 U JP17942085 U JP 17942085U JP S6287435 U JPS6287435 U JP S6287435U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- cleaning
- wafer
- scrubbing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000005201 scrubbing Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Brushes (AREA)
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17942085U JPS6287435U (it) | 1985-11-21 | 1985-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17942085U JPS6287435U (it) | 1985-11-21 | 1985-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6287435U true JPS6287435U (it) | 1987-06-04 |
Family
ID=31122465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17942085U Pending JPS6287435U (it) | 1985-11-21 | 1985-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6287435U (it) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5941124B2 (ja) * | 1979-06-29 | 1984-10-04 | インターナシヨナルビジネス マシーンズ コーポレーシヨン | 回転式エンコ−ダ装置 |
-
1985
- 1985-11-21 JP JP17942085U patent/JPS6287435U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5941124B2 (ja) * | 1979-06-29 | 1984-10-04 | インターナシヨナルビジネス マシーンズ コーポレーシヨン | 回転式エンコ−ダ装置 |