JPS6287432U - - Google Patents
Info
- Publication number
- JPS6287432U JPS6287432U JP1985178806U JP17880685U JPS6287432U JP S6287432 U JPS6287432 U JP S6287432U JP 1985178806 U JP1985178806 U JP 1985178806U JP 17880685 U JP17880685 U JP 17880685U JP S6287432 U JPS6287432 U JP S6287432U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support
- support rod
- center
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Spray Control Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985178806U JPH0135470Y2 (en:Method) | 1985-11-19 | 1985-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985178806U JPH0135470Y2 (en:Method) | 1985-11-19 | 1985-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6287432U true JPS6287432U (en:Method) | 1987-06-04 |
| JPH0135470Y2 JPH0135470Y2 (en:Method) | 1989-10-30 |
Family
ID=31121280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985178806U Expired JPH0135470Y2 (en:Method) | 1985-11-19 | 1985-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0135470Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0283927A (ja) * | 1988-09-21 | 1990-03-26 | Shibaura Eng Works Co Ltd | ガラス基板の乾燥装置 |
-
1985
- 1985-11-19 JP JP1985178806U patent/JPH0135470Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0283927A (ja) * | 1988-09-21 | 1990-03-26 | Shibaura Eng Works Co Ltd | ガラス基板の乾燥装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0135470Y2 (en:Method) | 1989-10-30 |