JPS6284929U - - Google Patents
Info
- Publication number
- JPS6284929U JPS6284929U JP17724185U JP17724185U JPS6284929U JP S6284929 U JPS6284929 U JP S6284929U JP 17724185 U JP17724185 U JP 17724185U JP 17724185 U JP17724185 U JP 17724185U JP S6284929 U JPS6284929 U JP S6284929U
- Authority
- JP
- Japan
- Prior art keywords
- polishing plate
- needle tip
- wafer prober
- tip polishing
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 241001422033 Thestylus Species 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Description
第１図ａおよびｂは本考案によるウエーハプロ
ーバの針先研磨板部分の一実施例の断面図および
側面図、第２図ａおよびｂは本考案によるウエー
ハプローバの針先研磨板の他の実施例の斜視図お
よびＡ―Ａ′断面図、第３図は本考案のウエーハ
プローバの針先研磨板の他の実施例の斜視図およ
びＢ―Ｂ′断面図、第４図は本考案のウエーハプ
ローバの針先研磨板のさらに他の実施例の斜視図
、第５図は従来のウエーハプローバの斜視図であ
る。
３……針先研磨板、４……溝。
1A and 1B are cross-sectional views and side views of one embodiment of the stylus polishing plate portion of the wafer prober according to the present invention, and FIGS. 2A and 2B are other embodiments of the stylus polishing plate of the wafer prober according to the present invention. FIG. 3 is a perspective view and a sectional view along line A-A' of another embodiment of the wafer prober needle polishing plate of the present invention, and FIG. 4 is a cross-sectional view of the wafer prober of the present invention. FIG. 5 is a perspective view of still another embodiment of a prober needle tip polishing plate, and FIG. 5 is a perspective view of a conventional wafer prober. 3...Needle tip polishing plate, 4...Groove.
Claims (1)
、該針先研磨板の上面に溝を設けたことを特徴と
するウエーハプローバ。 A wafer prober equipped with a needle tip polishing plate, characterized in that a groove is provided on the upper surface of the needle tip polishing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17724185U JPS6284929U (en) | 1985-11-18 | 1985-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17724185U JPS6284929U (en) | 1985-11-18 | 1985-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6284929U true JPS6284929U (en) | 1987-05-30 |
Family
ID=31118256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17724185U Pending JPS6284929U (en) | 1985-11-18 | 1985-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284929U (en) |
-
1985
- 1985-11-18 JP JP17724185U patent/JPS6284929U/ja active Pending