JPS6284159U - - Google Patents

Info

Publication number

JPS6284159U

JPS6284159U JP17490885U JP17490885U JPS6284159U JP S6284159 U JPS6284159 U JP S6284159U JP 17490885 U JP17490885 U JP 17490885U JP 17490885 U JP17490885 U JP 17490885U JP S6284159 U JPS6284159 U JP S6284159U

Authority

JP

Japan

Prior art keywords

cleaning

cooling water

equipment

ion implantation

bypass valve

Prior art date

1985-11-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000498 cooling water Substances 0.000 claims description 5
• 238000005468 ion implantation Methods 0.000 claims description 3
• 238000001816 cooling Methods 0.000 claims description 2
• 238000004140 cleaning Methods 0.000 claims 6
• 239000012530 fluid Substances 0.000 claims 1
• 239000007788 liquid Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2