JPS6284046U - - Google Patents

Info

Publication number

JPS6284046U

JPS6284046U JP1985175718U JP17571885U JPS6284046U JP S6284046 U JPS6284046 U JP S6284046U JP 1985175718 U JP1985175718 U JP 1985175718U JP 17571885 U JP17571885 U JP 17571885U JP S6284046 U JPS6284046 U JP S6284046U

Authority

JP

Japan

Prior art keywords

pattern

metal aluminum

photomask

glass plate

thin film

Prior art date

1985-11-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910052782 aluminium Inorganic materials 0.000 claims description 3
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
• 239000011521 glass Substances 0.000 claims description 2
• 229910052751 metal Inorganic materials 0.000 claims 2
• 239000002184 metal Substances 0.000 claims 2
• 239000010409 thin film Substances 0.000 claims 1
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1