JPS6283128U - - Google Patents

Info

Publication number
JPS6283128U
JPS6283128U JP17603585U JP17603585U JPS6283128U JP S6283128 U JPS6283128 U JP S6283128U JP 17603585 U JP17603585 U JP 17603585U JP 17603585 U JP17603585 U JP 17603585U JP S6283128 U JPS6283128 U JP S6283128U
Authority
JP
Japan
Prior art keywords
air
turntable
shower
suction port
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17603585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228351Y2 (sh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985176035U priority Critical patent/JPH0228351Y2/ja
Publication of JPS6283128U publication Critical patent/JPS6283128U/ja
Application granted granted Critical
Publication of JPH0228351Y2 publication Critical patent/JPH0228351Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1985176035U 1985-11-15 1985-11-15 Expired JPH0228351Y2 (sh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985176035U JPH0228351Y2 (sh) 1985-11-15 1985-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985176035U JPH0228351Y2 (sh) 1985-11-15 1985-11-15

Publications (2)

Publication Number Publication Date
JPS6283128U true JPS6283128U (sh) 1987-05-27
JPH0228351Y2 JPH0228351Y2 (sh) 1990-07-30

Family

ID=31115905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985176035U Expired JPH0228351Y2 (sh) 1985-11-15 1985-11-15

Country Status (1)

Country Link
JP (1) JPH0228351Y2 (sh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008281328A (ja) * 2007-04-13 2008-11-20 Semiconductor Energy Lab Co Ltd エアシャワー装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187587U (sh) * 1984-11-16 1986-06-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187587U (sh) * 1984-11-16 1986-06-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008281328A (ja) * 2007-04-13 2008-11-20 Semiconductor Energy Lab Co Ltd エアシャワー装置

Also Published As

Publication number Publication date
JPH0228351Y2 (sh) 1990-07-30

Similar Documents

Publication Publication Date Title
JPS6283128U (sh)
JPH02146351U (sh)
JPS6434542U (sh)
JPS6259186U (sh)
JPS61204765U (sh)
JPS6330934U (sh)
JPS6366596U (sh)
JPS6311400U (sh)
JPH0272842U (sh)
JPS6219017U (sh)
JPS62130836U (sh)
JPS62203120U (sh)
JPS62188345U (sh)
JPS6363525U (sh)
JPS6325039U (sh)
JPS62129966U (sh)
JPS6299378U (sh)
JPS61195497U (sh)
JPS6358516U (sh)
JPS6372499U (sh)
JPH0429637U (sh)
JPS6235633U (sh)
JPS62181186U (sh)
JPH01118563U (sh)
JPS61205657U (sh)