JPS6282738U - - Google Patents

Info

Publication number
JPS6282738U
JPS6282738U JP17376485U JP17376485U JPS6282738U JP S6282738 U JPS6282738 U JP S6282738U JP 17376485 U JP17376485 U JP 17376485U JP 17376485 U JP17376485 U JP 17376485U JP S6282738 U JPS6282738 U JP S6282738U
Authority
JP
Japan
Prior art keywords
carrier
wafers
nozzle
counting
gas pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17376485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316287Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17376485U priority Critical patent/JPH0316287Y2/ja
Publication of JPS6282738U publication Critical patent/JPS6282738U/ja
Application granted granted Critical
Publication of JPH0316287Y2 publication Critical patent/JPH0316287Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17376485U 1985-11-12 1985-11-12 Expired JPH0316287Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17376485U JPH0316287Y2 (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17376485U JPH0316287Y2 (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Publications (2)

Publication Number Publication Date
JPS6282738U true JPS6282738U (enrdf_load_stackoverflow) 1987-05-27
JPH0316287Y2 JPH0316287Y2 (enrdf_load_stackoverflow) 1991-04-08

Family

ID=31111529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17376485U Expired JPH0316287Y2 (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Country Status (1)

Country Link
JP (1) JPH0316287Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0316287Y2 (enrdf_load_stackoverflow) 1991-04-08

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