JPS6282599U - - Google Patents
Info
- Publication number
- JPS6282599U JPS6282599U JP17467085U JP17467085U JPS6282599U JP S6282599 U JPS6282599 U JP S6282599U JP 17467085 U JP17467085 U JP 17467085U JP 17467085 U JP17467085 U JP 17467085U JP S6282599 U JPS6282599 U JP S6282599U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electrode
- insulating material
- gas
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17467085U JPS6282599U (es) | 1985-11-13 | 1985-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17467085U JPS6282599U (es) | 1985-11-13 | 1985-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6282599U true JPS6282599U (es) | 1987-05-26 |
Family
ID=31113272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17467085U Pending JPS6282599U (es) | 1985-11-13 | 1985-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6282599U (es) |
-
1985
- 1985-11-13 JP JP17467085U patent/JPS6282599U/ja active Pending