JPS6281562U - - Google Patents

Info

Publication number
JPS6281562U
JPS6281562U JP1985173090U JP17309085U JPS6281562U JP S6281562 U JPS6281562 U JP S6281562U JP 1985173090 U JP1985173090 U JP 1985173090U JP 17309085 U JP17309085 U JP 17309085U JP S6281562 U JPS6281562 U JP S6281562U
Authority
JP
Japan
Prior art keywords
polishing
surface plate
sheet
polishing device
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985173090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985173090U priority Critical patent/JPS6281562U/ja
Publication of JPS6281562U publication Critical patent/JPS6281562U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP1985173090U 1985-11-11 1985-11-11 Pending JPS6281562U (US07122547-20061017-C00273.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985173090U JPS6281562U (US07122547-20061017-C00273.png) 1985-11-11 1985-11-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985173090U JPS6281562U (US07122547-20061017-C00273.png) 1985-11-11 1985-11-11

Publications (1)

Publication Number Publication Date
JPS6281562U true JPS6281562U (US07122547-20061017-C00273.png) 1987-05-25

Family

ID=31110224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985173090U Pending JPS6281562U (US07122547-20061017-C00273.png) 1985-11-11 1985-11-11

Country Status (1)

Country Link
JP (1) JPS6281562U (US07122547-20061017-C00273.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015009340A (ja) * 2013-07-01 2015-01-19 株式会社荏原製作所 研磨装置、研磨パッドの配置方法、及び研磨パッド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015009340A (ja) * 2013-07-01 2015-01-19 株式会社荏原製作所 研磨装置、研磨パッドの配置方法、及び研磨パッド
US9919403B2 (en) 2013-07-01 2018-03-20 Ebara Corporation Polishing apparatus, polishing pad positioning method, and polishing pad

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