JPS6281100U - - Google Patents

Info

Publication number
JPS6281100U
JPS6281100U JP17241285U JP17241285U JPS6281100U JP S6281100 U JPS6281100 U JP S6281100U JP 17241285 U JP17241285 U JP 17241285U JP 17241285 U JP17241285 U JP 17241285U JP S6281100 U JPS6281100 U JP S6281100U
Authority
JP
Japan
Prior art keywords
electron beam
vacuum exhaust
exhaust device
accelerator
beam accelerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17241285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH054000Y2 (US07968547-20110628-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17241285U priority Critical patent/JPH054000Y2/ja
Publication of JPS6281100U publication Critical patent/JPS6281100U/ja
Application granted granted Critical
Publication of JPH054000Y2 publication Critical patent/JPH054000Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP17241285U 1985-11-09 1985-11-09 Expired - Lifetime JPH054000Y2 (US07968547-20110628-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17241285U JPH054000Y2 (US07968547-20110628-C00004.png) 1985-11-09 1985-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17241285U JPH054000Y2 (US07968547-20110628-C00004.png) 1985-11-09 1985-11-09

Publications (2)

Publication Number Publication Date
JPS6281100U true JPS6281100U (US07968547-20110628-C00004.png) 1987-05-23
JPH054000Y2 JPH054000Y2 (US07968547-20110628-C00004.png) 1993-01-29

Family

ID=31108922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17241285U Expired - Lifetime JPH054000Y2 (US07968547-20110628-C00004.png) 1985-11-09 1985-11-09

Country Status (1)

Country Link
JP (1) JPH054000Y2 (US07968547-20110628-C00004.png)

Also Published As

Publication number Publication date
JPH054000Y2 (US07968547-20110628-C00004.png) 1993-01-29

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