JPS6281005U - - Google Patents

Info

Publication number
JPS6281005U
JPS6281005U JP17208885U JP17208885U JPS6281005U JP S6281005 U JPS6281005 U JP S6281005U JP 17208885 U JP17208885 U JP 17208885U JP 17208885 U JP17208885 U JP 17208885U JP S6281005 U JPS6281005 U JP S6281005U
Authority
JP
Japan
Prior art keywords
laser
inclination
moving table
interferometer
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17208885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17208885U priority Critical patent/JPS6281005U/ja
Publication of JPS6281005U publication Critical patent/JPS6281005U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP17208885U 1985-11-08 1985-11-08 Pending JPS6281005U (US20100170793A1-20100708-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17208885U JPS6281005U (US20100170793A1-20100708-C00006.png) 1985-11-08 1985-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17208885U JPS6281005U (US20100170793A1-20100708-C00006.png) 1985-11-08 1985-11-08

Publications (1)

Publication Number Publication Date
JPS6281005U true JPS6281005U (US20100170793A1-20100708-C00006.png) 1987-05-23

Family

ID=31108313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17208885U Pending JPS6281005U (US20100170793A1-20100708-C00006.png) 1985-11-08 1985-11-08

Country Status (1)

Country Link
JP (1) JPS6281005U (US20100170793A1-20100708-C00006.png)

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