JPS6281005U - - Google Patents

Info

Publication number

JPS6281005U

JPS6281005U JP17208885U JP17208885U JPS6281005U JP S6281005 U JPS6281005 U JP S6281005U JP 17208885 U JP17208885 U JP 17208885U JP 17208885 U JP17208885 U JP 17208885U JP S6281005 U JPS6281005 U JP S6281005U

Authority

JP

Japan

Prior art keywords

laser

inclination

moving table

interferometer

measuring device

Prior art date

1985-11-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000003754 machining Methods 0.000 claims 1
• 230000003287 optical effect Effects 0.000 claims 1
• 238000001514 detection method Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 238000010894 electron beam technology Methods 0.000 description 1