JPS6280338U - - Google Patents
Info
- Publication number
- JPS6280338U JPS6280338U JP17234285U JP17234285U JPS6280338U JP S6280338 U JPS6280338 U JP S6280338U JP 17234285 U JP17234285 U JP 17234285U JP 17234285 U JP17234285 U JP 17234285U JP S6280338 U JPS6280338 U JP S6280338U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- heat treatment
- boat
- groove
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17234285U JPH0337231Y2 (enEXAMPLES) | 1985-11-11 | 1985-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17234285U JPH0337231Y2 (enEXAMPLES) | 1985-11-11 | 1985-11-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6280338U true JPS6280338U (enEXAMPLES) | 1987-05-22 |
| JPH0337231Y2 JPH0337231Y2 (enEXAMPLES) | 1991-08-07 |
Family
ID=31108797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17234285U Expired JPH0337231Y2 (enEXAMPLES) | 1985-11-11 | 1985-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337231Y2 (enEXAMPLES) |
-
1985
- 1985-11-11 JP JP17234285U patent/JPH0337231Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337231Y2 (enEXAMPLES) | 1991-08-07 |