JPS6280318A - Magnetic vibration damping device - Google Patents

Magnetic vibration damping device

Info

Publication number
JPS6280318A
JPS6280318A JP21768285A JP21768285A JPS6280318A JP S6280318 A JPS6280318 A JP S6280318A JP 21768285 A JP21768285 A JP 21768285A JP 21768285 A JP21768285 A JP 21768285A JP S6280318 A JPS6280318 A JP S6280318A
Authority
JP
Japan
Prior art keywords
magnetic
vibration damping
permanent magnet
force
damping device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21768285A
Other languages
Japanese (ja)
Other versions
JP2511402B2 (en
Inventor
Toshimi Abukawa
俊美 虻川
Motoya Ito
元哉 伊藤
Keiji Arai
新井 啓治
Noriyoshi Takahashi
高橋 典義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60217682A priority Critical patent/JP2511402B2/en
Publication of JPS6280318A publication Critical patent/JPS6280318A/en
Application granted granted Critical
Publication of JP2511402B2 publication Critical patent/JP2511402B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F6/00Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid

Abstract

PURPOSE:To aim at miniaturizing permanent magnets and at stabilizing damping force, by disposing a vibration damping member having magnetic wires embedded at a predetermined density in an electroconductive material, in a part of a magnetic flux path created between a stationary permanent magnet and a rotary permanent magnet. CONSTITUTION:A ring-like rotary permanent magnet 13 which is attached on the upper surface of a thin disc-like attaching plate 12 secured to the upper end of a rotary shaft 11, is covered with a nonmagnetic protective cover 14 having a high specific resistance so that the magnet 13 is protected. Further, a stationary permanent magnet 15 is arranged and is magnetized so that the both magnets 13, 15 attract each other, and is covered at the opposing face side thereof with a vibration damping member 16 while nonmagnetic electroconductive materials 17 are made in close contact with both sides of them. Further, the vibration damping member 16 is formed by such a manner that magnetic steel wires are embedded in a nonmagnetic electroconductive material axially at a predetermined density. Accordingly, the permanent magnets may be miniaturized, and recovery force and damping force are stabilized while magnetization exciting force may be made less.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、磁気制振装置に係り、特に、小型でしかも安
定した性能を備えた磁気制振装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a magnetic vibration damping device, and particularly to a magnetic vibration damping device that is compact and has stable performance.

〔発明の背景〕[Background of the invention]

ターボ分子ポンプの軸受等には、磁気制振装置が広く用
いられている。この磁気制振装置は、たとえば、第29
図に示すように、固定側に配置された永久磁石1と良導
電板2との間に高透磁率板3を密着して介在させ、回転
側に配置された永久磁石4に対して所定のダンピング力
を得るようにしている。このような従来の装置として、
実公昭54−32133号公報記載のものがある。
Magnetic vibration damping devices are widely used in bearings and the like of turbomolecular pumps. This magnetic vibration damping device is, for example, the 29th
As shown in the figure, a high magnetic permeability plate 3 is closely interposed between a permanent magnet 1 placed on the stationary side and a good conductivity plate 2, and a predetermined distance is placed between the permanent magnet 4 placed on the rotating side. I'm trying to get some damping force. As such a conventional device,
There is one described in Japanese Utility Model Publication No. 54-32133.

しかし、従来装置では、半径方向のうず電流の通路を確
保するために、高透磁率板3の下に必ず非磁性の良導電
板2を設ける必要があり、この部分は、磁気的には空隙
となる。したがって、軸受特性を確保するためには、永
久磁石の寸法が大きくなり、固定部品も多く必要である
という欠点がある。
However, in the conventional device, in order to ensure a path for eddy current in the radial direction, it is necessary to provide a non-magnetic, highly conductive plate 2 under the high magnetic permeability plate 3, and this part is magnetically separated by an air gap. becomes. Therefore, in order to ensure bearing characteristics, the size of the permanent magnet becomes large and a large number of fixed parts are required.

〔発明の目的〕[Purpose of the invention]

そこで本発明は、小型で安定した性能を備える磁気制振
装置を提供することを目的とする。
Therefore, an object of the present invention is to provide a magnetic vibration damping device that is compact and has stable performance.

〔発明の概要〕[Summary of the invention]

上記目的を達成するため、本発明は、固定側および回転
側の各永久磁石間に形成される磁束通路部分に制振体を
設けてなり、この制振体は、導電材中に磁性線を所定密
度で埋設して構成されていることを特徴とし、制振体設
置部分の透磁率μXを極めて大きくしている。
In order to achieve the above object, the present invention provides a vibration damping body in the magnetic flux path portion formed between each permanent magnet on the fixed side and the rotating side, and this vibration damping body includes a magnetic wire in a conductive material. It is characterized by being buried at a predetermined density, and the magnetic permeability μX of the damping body installation portion is extremely large.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例を図面に基づいて詳細に説明する
Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図に示すように、回転軸11の上端部には。As shown in FIG. 1, at the upper end of the rotating shaft 11.

薄円板状の取付板12が固着され、この取付板12の上
面にリング状の回転側永久磁石13が取付けられるとと
もに、該回転側永久磁石13は。
A thin disc-shaped mounting plate 12 is fixed, and a ring-shaped rotating permanent magnet 13 is mounted on the upper surface of the mounting plate 12.

非磁性で高い固有抵抗を有する保護カバー14により覆
われて保護されている。固定側永久磁石15は、上記回
転側永久磁石13と軸方向に吸引し合うよう対向配置さ
れ、かつ磁化されている。
It is covered and protected by a protective cover 14 that is non-magnetic and has high specific resistance. The stationary permanent magnet 15 is arranged to face the rotating permanent magnet 13 so as to be attracted to each other in the axial direction, and is magnetized.

さらに、この固定側永久磁石15の下面側すなわち回転
側永久磁石13への対向面側は、制振体16により覆わ
れており、これらの両側部には、非磁性導電材17.1
7が密着されている。
Further, the lower surface side of the stationary permanent magnet 15, that is, the side facing the rotating permanent magnet 13, is covered with a vibration damper 16, and non-magnetic conductive materials 17.
7 is closely attached.

上記制振体16は、特に第2図に示すように、リング状
の非磁性導電材18に磁性材である鉄線19を軸方向に
延在するように所定密度で埋設してなるものである。こ
のような制振体16を作成するには、第3図に示すよう
に、鉄線19の外周に非磁性導電材18たとえば銅を所
定厚みにわたって一体的に被覆してなる複合磁性導線2
1をまず作成しておく。つぎに、上記複合磁性導線21
を所定長に切断した上で適当温度まで予熱し、該複合磁
性導線21の外周の非磁性導電材18と同質の非磁性導
電材17髪用いて第4図に示すような断面凹形状に鋳込
む。
As particularly shown in FIG. 2, the vibration damping body 16 is made by embedding iron wires 19, which are magnetic materials, at a predetermined density in a ring-shaped non-magnetic conductive material 18 so as to extend in the axial direction. . In order to create such a vibration damping body 16, as shown in FIG.
Create 1 first. Next, the composite magnetic conducting wire 21
is cut into a predetermined length, preheated to an appropriate temperature, and cast into a concave cross-sectional shape as shown in FIG. It's crowded.

このような構成からなる制振装置の固定側永久磁石15
と制振体16との密着部分では、第5図に示すように、
透磁率μX(縦軸)が、鉄線19の占積率にほぼ比例し
て増大されている。そして。
Fixed side permanent magnet 15 of the vibration damping device having such a configuration
As shown in FIG.
The magnetic permeability μX (vertical axis) is increased approximately in proportion to the space factor of the iron wire 19. and.

実際の値は、空気の数倍ないし数百倍の大きさになる。The actual value is several to hundreds of times larger than that of air.

また、制振体16の内外部分は、非磁性導電材17によ
り電気的に接続されるため、うず電流路が確保される。
Furthermore, since the inner and outer portions of the vibration damper 16 are electrically connected by the non-magnetic conductive material 17, an eddy current path is ensured.

したがって、両永久磁石13と15との空隙高さgを小
さくすることが可能となるとともに、これによって空隙
部で消費される起磁力が小さく抑えられ、両永久磁石1
3.15の高さを小さくすることが可能となる。
Therefore, it is possible to reduce the air gap height g between both permanent magnets 13 and 15, and thereby the magnetomotive force consumed in the air gap is suppressed to a small level, and both permanent magnets 1
It becomes possible to reduce the height of 3.15.

第6図に示すように1両磁石間で発生する吸引力F(縦
軸)は、磁気ギャップg(横軸)に反比例するが、磁気
軸受′!A置に要求される特性としては、所定の吸引力
Ft  (このFtは、回転体重量W以下でしかも回転
体の温度上昇による伸び等を考慮して定められる。)を
有し、かつ所定の半径方向復元力や制振力を有すること
が必要となる。
As shown in Fig. 6, the attractive force F (vertical axis) generated between two magnets is inversely proportional to the magnetic gap g (horizontal axis), but the magnetic bearing'! The characteristics required for the A position are to have a predetermined suction force Ft (this Ft is determined by taking into account elongation due to temperature rise of the rotating body and not more than the rotating weight W), and It is necessary to have radial restoring force and vibration damping force.

両永久磁石13.15を従来のもの(第29図参照)の
0.7 倍にした場合の半径方向復元力を比較した結果
、第7図に示すように1本発明のもの(実線)は、従来
のもの(破線)と同等の値を備えうろことが判明した。
As a result of comparing the radial restoring force when both permanent magnets 13.15 are made 0.7 times that of the conventional one (see Fig. 29), as shown in Fig. 7, one of the present invention (solid line) has , was found to have a value equivalent to that of the conventional one (dashed line).

また、第8図に示すように、制振力も同等の値が得られ
ている。
Furthermore, as shown in FIG. 8, similar values of damping force were obtained.

おいて急激に変化しており、強い制振力が得られること
になっている。′ また、第10図および第11図に示す実施例では、鉄4
1i!19が固定側永久磁石の両縁部すなわち主磁気通
路の両側部に集中配置されている。このようにしても上
記実施例と同様の効果を得ることができる。
It is expected that a strong vibration damping force will be obtained. ' Also, in the embodiment shown in FIGS. 10 and 11, iron 4
1i! 19 are concentrated on both edges of the fixed permanent magnet, that is, on both sides of the main magnetic path. Even in this case, the same effects as in the above embodiment can be obtained.

さらに、第12図に示すように、鉄線19を半径方向に
千鳥配列したり、第13図に示すように。
Furthermore, as shown in FIG. 12, the iron wires 19 may be arranged in a staggered manner in the radial direction, or as shown in FIG.

鉄線19を放射状に配し、あるいは第14図のようにこ
れを複数段にわたって設けるようにしてもよい。また、
第15図に示す実施例では、鉄線19を格子状に配して
なり、第16図には、鉄線19を本体側に直接埋め込む
ようにした実施例を示している。
The iron wires 19 may be arranged radially, or may be provided in multiple stages as shown in FIG. Also,
In the embodiment shown in FIG. 15, iron wires 19 are arranged in a grid pattern, and FIG. 16 shows an embodiment in which the iron wires 19 are directly embedded in the main body.

さらにまた、第17図に示す実施例は、固定側に内外2
個の永久磁石15.25を備えた反発形の磁気軸受に本
発明を適用したものであり、各固定側永久磁石15.2
5のそれぞれに制振体16を取付けるようにしている。
Furthermore, the embodiment shown in FIG. 17 has two inner and outer parts on the fixed side.
The present invention is applied to a repulsion type magnetic bearing equipped with 15.25 permanent magnets, and each fixed side permanent magnet 15.2
A damping body 16 is attached to each of the vibration absorbers 5.

第18図は1回転何永久磁石13と固定側永久磁石15
とが半径方向に対向するように設けられた反発形の磁気
軸受を示しており1回転側永久磁石13の直上部分およ
び固定側永久磁石15の直下部分のそれぞれに制振体1
6,16が設置されている。第19図に示す磁気軸受は
、回転側に磁性体ヨーク26を用いるようにしたもので
あり、固定側永久磁石15に接続された磁性体27の先
端部に制振体16を設けている。なお、第20図に示す
ように、鉄線19を磁性体ヨーク26の中央および両側
に設けてもよい。
Figure 18 shows how many permanent magnets 13 and stationary permanent magnets 15 per revolution.
The figure shows a repulsion type magnetic bearing in which the magnetic bearings are disposed so as to face each other in the radial direction.
6 and 16 are installed. The magnetic bearing shown in FIG. 19 uses a magnetic yoke 26 on the rotating side, and a damper 16 is provided at the tip of the magnetic body 27 connected to the fixed permanent magnet 15. Note that, as shown in FIG. 20, the iron wire 19 may be provided at the center and both sides of the magnetic yoke 26.

つぎに、第21図に示す実施例では、主磁気通路の両側
にも鉄線19を配設するようにしている。
Next, in the embodiment shown in FIG. 21, iron wires 19 are also provided on both sides of the main magnetic path.

このような構成によれば、回転側と固定側との軸ずれか
ない場合には、第22図に示すような左右対称の磁束分
布であり、両側の軸ずれが生じた場合には、第23図の
ように、鉄線19の近傍の磁束が急激に変化する。これ
によりうず電流が生じ、うず電流に比例した制振力が発
生する。この制振力は、第24図に示すように、本発明
のもの(実′つ)が従来のもの(破線)より大きい。
According to such a configuration, when there is no axis misalignment between the rotating side and the stationary side, the magnetic flux distribution is symmetrical as shown in Fig. 22, and when axis misalignment occurs on both sides, the magnetic flux distribution is symmetrical as shown in Fig. 22. As shown in the figure, the magnetic flux near the iron wire 19 changes rapidly. This generates eddy current, which generates a damping force proportional to the eddy current. As shown in FIG. 24, this damping force is larger in the present invention (actual) than in the conventional damping force (broken line).

第25図に示す実施例では、鉄線】9を固定側永久磁石
]5の内側部分に集中配置している。このようにすれば
、磁束を急変させて大きな制振力を得ることができる。
In the embodiment shown in FIG. 25, the iron wires 9 are concentrated inside the fixed permanent magnet 5. In this way, it is possible to suddenly change the magnetic flux and obtain a large damping force.

また、第26図に示す実施例のように、固定側永久磁石
15の両側に設けた鉄m19を軸方向に延長すれば、漏
れ磁束が増大されて大きな制振力を得ることができる。
Furthermore, as in the embodiment shown in FIG. 26, if the iron m19 provided on both sides of the stationary permanent magnet 15 is extended in the axial direction, the leakage magnetic flux is increased and a large damping force can be obtained.

さらに、第27図に示すように、鉄線19を半径方向に
延出するように多層にわたって設置したり、第28図の
ように、回転側永久磁石13の外側部分に鉄線19を配
設したりすることもできる。
Furthermore, as shown in FIG. 27, the iron wire 19 may be installed in multiple layers so as to extend in the radial direction, or as shown in FIG. 28, the iron wire 19 may be placed outside the rotating permanent magnet 13. You can also.

〔発明の効果〕〔Effect of the invention〕

以上述入たように、本発明による磁気制振装置は、固定
側永久磁石と回転側永久磁石との間に、透磁率を増大せ
しめる制振体を配置するようにしたから、永久磁石の小
型化を図ることができ、復元力、制振力を安定的に発揮
させることができる。
As described above, the magnetic vibration damping device according to the present invention has a damping body that increases magnetic permeability between the stationary permanent magnet and the rotating permanent magnet, so that the permanent magnet can be made smaller. It is possible to stabilize the restoring force and damping force.

また、永久磁石の着磁に必要な起磁力も小さくて済む。Further, the magnetomotive force required to magnetize the permanent magnet can also be small.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例における磁気制振装置の縦断
面図、第2図は制振体の斜視図、第3図は複合磁束導線
の斜視図、第4図は固定側の枠体を表わした縦断面図、
第5図は透磁率を表示した線図、第6図は吸引力と磁気
ギャップとの関係線の他の実施例における固定側枠体の
縦断面図、第11図、第12図および第13図は制振体
の他の実施例を表した斜視図、第14図ないし第21図
は本発明のさらに他の実施例を表した縦断面図、第22
図および第23図は磁束変化を示した部分拡大縦断面図
、第24図は制振力の比較図、第25図ないし第28図
は本発明のさらに他の実施例を示した縦断面図、第29
図は従来装置の縦断面図である。 11・・回転軸、12・・・取付板、13・・・回転側
永久磁石、15・・・固定側永久磁石、16・・・制振
体、17.18・・・非磁性湛電体、19・・・鉄線、
21・・・複合磁性導線。
Fig. 1 is a longitudinal cross-sectional view of a magnetic vibration damping device according to an embodiment of the present invention, Fig. 2 is a perspective view of a vibration damper, Fig. 3 is a perspective view of a composite magnetic flux conductor, and Fig. 4 is a fixed side frame. Longitudinal cross-sectional view showing the body,
Fig. 5 is a line diagram showing magnetic permeability, Fig. 6 is a vertical cross-sectional view of the fixed side frame in another embodiment of the relationship line between attractive force and magnetic gap, Figs. 11, 12, and 13. The figure is a perspective view showing another embodiment of the damping body, FIGS. 14 to 21 are longitudinal cross-sectional views showing still other embodiments of the present invention, and FIG.
23 and 23 are partially enlarged longitudinal sectional views showing changes in magnetic flux, FIG. 24 is a comparison diagram of damping force, and FIGS. 25 to 28 are longitudinal sectional views showing still other embodiments of the present invention. , 29th
The figure is a longitudinal sectional view of a conventional device. 11... Rotating shaft, 12... Mounting plate, 13... Rotating side permanent magnet, 15... Stationary side permanent magnet, 16... Vibration suppressor, 17.18... Non-magnetic electric body , 19... iron wire,
21...Composite magnetic conducting wire.

Claims (1)

【特許請求の範囲】 1、固定側および回転側のそれぞれに取付けられた永久
磁石の相互作用により軸心ずれ時にうず電流を発生せし
めてダンパー効果を得るようにした磁気制振装置におい
て、固定側および回転側の各永久磁石間に形成される磁
束通路部分に制振体を配設してなり、この制振体は、導
電材中に磁性線を所定密度で埋設して構成されているこ
とを特徴とする磁気制振装置。 2、制振体は、主磁気通路および主磁気通路の近傍にわ
たつて設置されていることを特徴とする特許請求の範囲
第1項記載の磁気制振装置。
[Claims] 1. In a magnetic vibration damping device that generates an eddy current at the time of axis misalignment through the interaction of permanent magnets attached to each of the fixed side and the rotating side to obtain a damper effect, the fixed side and a vibration damper is disposed in the magnetic flux path formed between each permanent magnet on the rotating side, and the vibration damper is constructed by embedding magnetic wires at a predetermined density in a conductive material. A magnetic vibration damping device featuring: 2. The magnetic vibration damping device according to claim 1, wherein the vibration damping body is installed across the main magnetic path and the vicinity of the main magnetic path.
JP60217682A 1985-09-30 1985-09-30 Magnetic damping device Expired - Lifetime JP2511402B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60217682A JP2511402B2 (en) 1985-09-30 1985-09-30 Magnetic damping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60217682A JP2511402B2 (en) 1985-09-30 1985-09-30 Magnetic damping device

Publications (2)

Publication Number Publication Date
JPS6280318A true JPS6280318A (en) 1987-04-13
JP2511402B2 JP2511402B2 (en) 1996-06-26

Family

ID=16708063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60217682A Expired - Lifetime JP2511402B2 (en) 1985-09-30 1985-09-30 Magnetic damping device

Country Status (1)

Country Link
JP (1) JP2511402B2 (en)

Cited By (7)

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US5218598A (en) * 1990-01-29 1993-06-08 Sony Corporation Disc driving apparatus with magnetic means for preventing axial movement
US5274346A (en) * 1991-08-22 1993-12-28 Tdk Corporation Integrated LC filter
US5402321A (en) * 1991-05-27 1995-03-28 Tdk Corporation Composite device having inductor and coupling member
EP1172581A3 (en) * 2000-07-11 2003-06-04 Delta Tooling Co., Ltd. Vibration damping apparatus using magnetic circuit
EP1541893A1 (en) * 2003-12-12 2005-06-15 LuK Lamellen und Kupplungsbau Beteiligungs KG Damping device
DE10351572B4 (en) * 2002-11-07 2013-08-01 Smc Corp. Magnetic damper and actuator with magnetic damper
CN110014115A (en) * 2019-04-19 2019-07-16 福州大学 A kind of vibration absorber and its working method of electromagnetic rivet driver

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US5218598A (en) * 1990-01-29 1993-06-08 Sony Corporation Disc driving apparatus with magnetic means for preventing axial movement
US5402321A (en) * 1991-05-27 1995-03-28 Tdk Corporation Composite device having inductor and coupling member
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EP1172581A3 (en) * 2000-07-11 2003-06-04 Delta Tooling Co., Ltd. Vibration damping apparatus using magnetic circuit
DE10351572B4 (en) * 2002-11-07 2013-08-01 Smc Corp. Magnetic damper and actuator with magnetic damper
EP1541893A1 (en) * 2003-12-12 2005-06-15 LuK Lamellen und Kupplungsbau Beteiligungs KG Damping device
CN110014115A (en) * 2019-04-19 2019-07-16 福州大学 A kind of vibration absorber and its working method of electromagnetic rivet driver
CN110014115B (en) * 2019-04-19 2023-10-10 福州大学 Vibration damper of electromagnetic riveter and working method thereof

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