JPS6279876U - - Google Patents

Info

Publication number
JPS6279876U
JPS6279876U JP17268385U JP17268385U JPS6279876U JP S6279876 U JPS6279876 U JP S6279876U JP 17268385 U JP17268385 U JP 17268385U JP 17268385 U JP17268385 U JP 17268385U JP S6279876 U JPS6279876 U JP S6279876U
Authority
JP
Japan
Prior art keywords
furnace
core tube
main body
furnace core
horizontal part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17268385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17268385U priority Critical patent/JPS6279876U/ja
Publication of JPS6279876U publication Critical patent/JPS6279876U/ja
Pending legal-status Critical Current

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Landscapes

  • Chemical Vapour Deposition (AREA)
JP17268385U 1985-11-09 1985-11-09 Pending JPS6279876U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17268385U JPS6279876U (enrdf_load_stackoverflow) 1985-11-09 1985-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17268385U JPS6279876U (enrdf_load_stackoverflow) 1985-11-09 1985-11-09

Publications (1)

Publication Number Publication Date
JPS6279876U true JPS6279876U (enrdf_load_stackoverflow) 1987-05-21

Family

ID=31109445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17268385U Pending JPS6279876U (enrdf_load_stackoverflow) 1985-11-09 1985-11-09

Country Status (1)

Country Link
JP (1) JPS6279876U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934271A (enrdf_load_stackoverflow) * 1972-07-28 1974-03-29
JPS52146706A (en) * 1976-05-31 1977-12-06 Shimadzu Corp Continuous heat treatment apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934271A (enrdf_load_stackoverflow) * 1972-07-28 1974-03-29
JPS52146706A (en) * 1976-05-31 1977-12-06 Shimadzu Corp Continuous heat treatment apparatus

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