JPS6279870U - - Google Patents
Info
- Publication number
- JPS6279870U JPS6279870U JP17011985U JP17011985U JPS6279870U JP S6279870 U JPS6279870 U JP S6279870U JP 17011985 U JP17011985 U JP 17011985U JP 17011985 U JP17011985 U JP 17011985U JP S6279870 U JPS6279870 U JP S6279870U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- heat medium
- medium fluid
- passage
- ribs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17011985U JPS6279870U (en, 2012) | 1985-11-05 | 1985-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17011985U JPS6279870U (en, 2012) | 1985-11-05 | 1985-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6279870U true JPS6279870U (en, 2012) | 1987-05-21 |
Family
ID=31104556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17011985U Pending JPS6279870U (en, 2012) | 1985-11-05 | 1985-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6279870U (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60110873A (ja) * | 1983-11-17 | 1985-06-17 | Fujitsu Ltd | タ−ゲットの冷却方法 |
-
1985
- 1985-11-05 JP JP17011985U patent/JPS6279870U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60110873A (ja) * | 1983-11-17 | 1985-06-17 | Fujitsu Ltd | タ−ゲットの冷却方法 |