JPS6279869U - - Google Patents

Info

Publication number
JPS6279869U
JPS6279869U JP16862785U JP16862785U JPS6279869U JP S6279869 U JPS6279869 U JP S6279869U JP 16862785 U JP16862785 U JP 16862785U JP 16862785 U JP16862785 U JP 16862785U JP S6279869 U JPS6279869 U JP S6279869U
Authority
JP
Japan
Prior art keywords
sputtering device
sputtered
wheels
pipe
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16862785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16862785U priority Critical patent/JPS6279869U/ja
Publication of JPS6279869U publication Critical patent/JPS6279869U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16862785U 1985-11-01 1985-11-01 Pending JPS6279869U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16862785U JPS6279869U (enrdf_load_stackoverflow) 1985-11-01 1985-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16862785U JPS6279869U (enrdf_load_stackoverflow) 1985-11-01 1985-11-01

Publications (1)

Publication Number Publication Date
JPS6279869U true JPS6279869U (enrdf_load_stackoverflow) 1987-05-21

Family

ID=31101678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16862785U Pending JPS6279869U (enrdf_load_stackoverflow) 1985-11-01 1985-11-01

Country Status (1)

Country Link
JP (1) JPS6279869U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146467A (en) * 1979-05-01 1980-11-14 Ricoh Co Ltd Fixing temperature overrise prevention circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146467A (en) * 1979-05-01 1980-11-14 Ricoh Co Ltd Fixing temperature overrise prevention circuit

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