JPS6279577U - - Google Patents

Info

Publication number

JPS6279577U

JPS6279577U JP17027485U JP17027485U JPS6279577U JP S6279577 U JPS6279577 U JP S6279577U JP 17027485 U JP17027485 U JP 17027485U JP 17027485 U JP17027485 U JP 17027485U JP S6279577 U JPS6279577 U JP S6279577U

Authority

JP

Japan

Prior art keywords

nozzle

coating

coating liquid

evaporation

coating device

Prior art date

1985-11-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011248 coating agent Substances 0.000 claims description 6
• 238000000576 coating method Methods 0.000 claims description 6
• 230000008020 evaporation Effects 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims description 3
• 239000007788 liquid Substances 0.000 claims description 3
• 230000002265 prevention Effects 0.000 claims description 2
• 239000002904 solvent Substances 0.000 claims 1
• 238000004528 spin coating Methods 0.000 claims 1

Cited By (1)