JPS6279577U - - Google Patents

Info

Publication number
JPS6279577U
JPS6279577U JP17027485U JP17027485U JPS6279577U JP S6279577 U JPS6279577 U JP S6279577U JP 17027485 U JP17027485 U JP 17027485U JP 17027485 U JP17027485 U JP 17027485U JP S6279577 U JPS6279577 U JP S6279577U
Authority
JP
Japan
Prior art keywords
nozzle
coating
coating liquid
evaporation
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17027485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17027485U priority Critical patent/JPS6279577U/ja
Publication of JPS6279577U publication Critical patent/JPS6279577U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP17027485U 1985-11-05 1985-11-05 Pending JPS6279577U (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17027485U JPS6279577U (US20020095090A1-20020718-M00002.png) 1985-11-05 1985-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17027485U JPS6279577U (US20020095090A1-20020718-M00002.png) 1985-11-05 1985-11-05

Publications (1)

Publication Number Publication Date
JPS6279577U true JPS6279577U (US20020095090A1-20020718-M00002.png) 1987-05-21

Family

ID=31104853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17027485U Pending JPS6279577U (US20020095090A1-20020718-M00002.png) 1985-11-05 1985-11-05

Country Status (1)

Country Link
JP (1) JPS6279577U (US20020095090A1-20020718-M00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648621A (en) * 1987-06-30 1989-01-12 Fujitsu Ltd Resist coating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648621A (en) * 1987-06-30 1989-01-12 Fujitsu Ltd Resist coating apparatus

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