JPS6277741U - - Google Patents

Info

Publication number
JPS6277741U
JPS6277741U JP16747785U JP16747785U JPS6277741U JP S6277741 U JPS6277741 U JP S6277741U JP 16747785 U JP16747785 U JP 16747785U JP 16747785 U JP16747785 U JP 16747785U JP S6277741 U JPS6277741 U JP S6277741U
Authority
JP
Japan
Prior art keywords
cleanliness
clean room
level
clean
multiplex
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16747785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16747785U priority Critical patent/JPS6277741U/ja
Publication of JPS6277741U publication Critical patent/JPS6277741U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP16747785U 1985-11-01 1985-11-01 Pending JPS6277741U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16747785U JPS6277741U (enExample) 1985-11-01 1985-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16747785U JPS6277741U (enExample) 1985-11-01 1985-11-01

Publications (1)

Publication Number Publication Date
JPS6277741U true JPS6277741U (enExample) 1987-05-18

Family

ID=31099441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16747785U Pending JPS6277741U (enExample) 1985-11-01 1985-11-01

Country Status (1)

Country Link
JP (1) JPS6277741U (enExample)

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