JPS6277377U - - Google Patents
Info
- Publication number
- JPS6277377U JPS6277377U JP16810185U JP16810185U JPS6277377U JP S6277377 U JPS6277377 U JP S6277377U JP 16810185 U JP16810185 U JP 16810185U JP 16810185 U JP16810185 U JP 16810185U JP S6277377 U JPS6277377 U JP S6277377U
- Authority
- JP
- Japan
- Prior art keywords
- valve member
- switching
- communicates
- switching position
- pressure port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007935 neutral effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Magnetically Actuated Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16810185U JPH0235097Y2 (th) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16810185U JPH0235097Y2 (th) | 1985-10-31 | 1985-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6277377U true JPS6277377U (th) | 1987-05-18 |
| JPH0235097Y2 JPH0235097Y2 (th) | 1990-09-21 |
Family
ID=31100663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16810185U Expired JPH0235097Y2 (th) | 1985-10-31 | 1985-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235097Y2 (th) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007030139A (ja) * | 2005-07-29 | 2007-02-08 | Seiko Instruments Inc | 真空チャック |
| WO2009008384A1 (ja) * | 2007-07-11 | 2009-01-15 | Sumitomo Heavy Industries, Ltd. | サーボ弁及びこれを用いたエアアクチュエータ |
-
1985
- 1985-10-31 JP JP16810185U patent/JPH0235097Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007030139A (ja) * | 2005-07-29 | 2007-02-08 | Seiko Instruments Inc | 真空チャック |
| JP4544529B2 (ja) * | 2005-07-29 | 2010-09-15 | セイコーインスツル株式会社 | 真空チャック |
| WO2009008384A1 (ja) * | 2007-07-11 | 2009-01-15 | Sumitomo Heavy Industries, Ltd. | サーボ弁及びこれを用いたエアアクチュエータ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0235097Y2 (th) | 1990-09-21 |