JPS6276984U - - Google Patents
Info
- Publication number
- JPS6276984U JPS6276984U JP16791585U JP16791585U JPS6276984U JP S6276984 U JPS6276984 U JP S6276984U JP 16791585 U JP16791585 U JP 16791585U JP 16791585 U JP16791585 U JP 16791585U JP S6276984 U JPS6276984 U JP S6276984U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- washing tub
- supply means
- liquid level
- liquid supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 13
- 238000005406 washing Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16791585U JPS6276984U (pt) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16791585U JPS6276984U (pt) | 1985-10-31 | 1985-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6276984U true JPS6276984U (pt) | 1987-05-16 |
Family
ID=31100297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16791585U Pending JPS6276984U (pt) | 1985-10-31 | 1985-10-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6276984U (pt) |
-
1985
- 1985-10-31 JP JP16791585U patent/JPS6276984U/ja active Pending