JPS6276699U - - Google Patents

Info

Publication number
JPS6276699U
JPS6276699U JP16898085U JP16898085U JPS6276699U JP S6276699 U JPS6276699 U JP S6276699U JP 16898085 U JP16898085 U JP 16898085U JP 16898085 U JP16898085 U JP 16898085U JP S6276699 U JPS6276699 U JP S6276699U
Authority
JP
Japan
Prior art keywords
cylinder
case
protective guide
vacuum chamber
cylindrical body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16898085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16898085U priority Critical patent/JPH0539520Y2/ja
Publication of JPS6276699U publication Critical patent/JPS6276699U/ja
Application granted granted Critical
Publication of JPH0539520Y2 publication Critical patent/JPH0539520Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Manipulator (AREA)
  • Particle Accelerators (AREA)
JP16898085U 1985-10-31 1985-10-31 Expired - Lifetime JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16898085U JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16898085U JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-31 1985-10-31

Publications (2)

Publication Number Publication Date
JPS6276699U true JPS6276699U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-05-16
JPH0539520Y2 JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-06

Family

ID=31102364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16898085U Expired - Lifetime JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0539520Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-06

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